OLED vacuum coating drying system
A drying system and vacuum coating technology, used in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problem of easy contamination of organic impurities and dust particles, unable to eliminate the influence of charged particles, and unable to selectively adjust Coating and other problems, to avoid contamination with organic impurities and dust particles, reduce losses, and reduce the area of coverage
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[0026]The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0027] like Figure 1-8 As shown, an OLED vacuum coating drying system includes a square box 1, a manual rotor 101 is installed in the middle of the front surface of the square box 1 near the upper side, and an electric current is installed on the outer surface of the square box 1 near the left side. Evaporation machine 2, the middle position of the right end surface of the square box 1 is fixed with the front body shell 3 near the lower side, and the middle position of the upper e...
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