Method and device for regulating and controlling 213nm laser output power

Abstract

The invention provides a method for regulating and controlling 213nm laser output power. The method comprises the following steps: S1, setting the temperature of a frequency tripling crystal; S2, outputting 532 nm laser and 355 nm laser by using a frequency tripling crystal; S3, performing sum frequency on the 532nm laser and the 355nm laser to obtain 213nm laser, and recording the output power ofthe 213nm laser; S4, repeatedly executing the steps S1 to S3 for multiple times, setting the temperatures of the frequency tripling crystals to be different each time, recording the output power of the 213nm laser at different temperatures, and further obtaining the corresponding relationship between the temperature of the frequency tripling crystals and the output power of the 213nm laser; and S5, adjusting the temperature of the frequency tripling crystal according to the corresponding relation so as to adjust and control the output power of the 213nm laser. The invention further provides adevice for regulating and controlling the 213nm laser output power.

Description

technical field [0001] The present disclosure relates to the field of laser technology, in particular to a method and device for regulating and controlling the output power of a 213nm laser. Background technique [0002] The way to control the laser output power is generally divided into two categories, one is to control the input end, such as controlling the current or voltage of the laser pump source to change the laser output power; the other is to control the output end, such as in the laser The output end is inserted into an acousto-optic modulator to control the output power of the laser. [0003] However, for 213nm lasers, firstly, there is no optical device available on the market for power control at the output end, and secondly, power control at the input end is to regulate the 1064nm power output at the output end of the fundamental frequency laser. The laser needs to perform frequency conversion at least 3 times. Changing the input power of the fundamental frequ...

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Problems solved by technology

[0003] However, for 213nm lasers, firstly, there is no optical device available on the market for power control at the output end, and secondly, power control at the input end is to regulate the 1064nm power output at the output end of the fundamental frequency laser. The laser needs to perform frequency conversion at least 3 times. Changing the input power of the fundamental frequency 1064nm to adjust the output optical power after multiple frequency mixing will change the beam quality of the final output light at 213nm, and also make the output power, power stability and Beam quality becomes uncontrollable, increasing overall system instability

Generally speaking, there is no available method and device for regulating the output power of the quintuple frequency 213nm laser in the existing market

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