Device and method for simultaneously detecting positioning precision and straightness of linear displacement table

A technology of positioning accuracy and linear displacement, which can be used in measurement devices, optical devices, instruments, etc., and can solve the problems of high price and high measurement cost.

Active Publication Date: 2021-03-19
HEFEI UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At this stage, for the measurement of small displacements, the most commonly used measurement method is laser interferometer m...

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  • Device and method for simultaneously detecting positioning precision and straightness of linear displacement table
  • Device and method for simultaneously detecting positioning precision and straightness of linear displacement table
  • Device and method for simultaneously detecting positioning precision and straightness of linear displacement table

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Embodiment Construction

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.

[0034] Such as figure 1 As shown, a device for simultaneously detecting the positioning accuracy and straightness of a linear displacement stage is characterized in that it includes a laser 1, a circular platform lens 2 and a CCD camera 3 that are linearly distributed sequentially, wherein:

[0035] The upper and lower end surfaces of the circular table lens are equipped with reflective films. The circular table lens is fixed on the worktable of the linear displacement stage. The positions of the laser and the CCD camera are fixed. The beam emitted by the laser is refracted through the inclined surface of the circular table lens, and the refracted beam reaches the circular table. Reflection occurs on the lower surface of the lens, and the reflected beam reaches the back of the truncated lens to be refracted a...

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Abstract

The invention discloses a device and method for simultaneously detecting the positioning precision and straightness of a linear displacement table, and the device comprises a laser, a circular truncated cone lens and a CCD camera which are linearly distributed in sequence, wherein the circular truncated cone lens is fixed on a workbench of the linear displacement table, and the positions of the laser and the CCD camera are fixed, light beams emitted by the laser are refracted through an inclined surface on one side of the circular truncated cone lens, the refracted light beams reach the lowersurface of the circular truncated cone lens and then are reflected, and the reflected light beams reach the back surface of the circular truncated cone lens, are refracted again and finally reach thesurface of the CCD camera lens to form light spots. According to the detection method, a measurement method based on combination of an auto-collimation principle and CCD camera shooting is adopted, simultaneous detection of the positioning precision and the straightness of the linear displacement table can be realized by using a single laser and the circular truncated cone lens, and the precisionis relatively high. Moreover, the measuring device is simple in structure, the cost of adopted devices is lower than that of traditional calibrated instruments and equipment, and the measuring cost issaved to a great extent.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a device and method for simultaneously detecting the positioning accuracy and straightness of a linear displacement platform. Background technique [0002] In the fields of precision machinery and control, the measurement of small displacements is of great significance for improving the accuracy of instruments and equipment. At present, for the measurement of small displacements, the most commonly used measurement method is laser interferometer measurement, which has high measurement accuracy, fast speed, and good stability, but it is expensive and the measurement cost is high. Contents of the invention [0003] The purpose of the present invention is to provide a device and method for simultaneously detecting the positioning accuracy and straightness of a linear displacement platform, so as to improve the detection accuracy and reduce the detection cost w...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B11/27
CPCG01B11/022G01B11/27
Inventor 赵会宁丁雯靖符晗于连栋夏豪杰蒲松
Owner HEFEI UNIV OF TECH
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