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Wafer transferring device

A converter and wafer technology, applied in semiconductor/solid-state device manufacturing, conveyor objects, electrical components, etc., can solve problems such as errors, and achieve the effect of solving errors

Pending Publication Date: 2021-03-23
天霖(张家港)电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the existing wafer changer, the carrier wafer boat is placed on the side close to the pusher, and the wafer carrier to be loaded is placed on the opposite side of the wafer carrier boat. By manual means, it is confirmed whether the wafer placement is stable. correct, and then push the pusher to push the wafer into the wafer boat to be loaded, and complete the placement of the wafer. There is a certain error in manual placement and positioning.

Method used

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  • Wafer transferring device

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Embodiment Construction

[0011] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0012] Such as figure 1 As shown, a wafer converter includes a base 1 and a changeover switch, the base 1 is provided with a first positioning device 11 and a second positioning device 12, and on the first positioning device 11 and the second positioning device 12 Position sensors 13 are installed, one end of the base 1 is provided with a groove structure, and a push rod 3 and a motor 4 that drives the push rod 3 to slide left and right in the groove structure provided at one end of the base 1 are also included. The sensor 13 and the motor 4 are connected by a circuit; the base 1 is provided with a first positioning device 11 and a second positioning device 12, so that the wafer will not be angularly shifted during the conversion process, and the first positioning device 11 and the second positioning device Second, the position sensor 13 insta...

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PUM

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Abstract

The invention discloses a wafer transferring device. The wafer transferring device comprises a base and a change-over switch; a first positioning device and a second positioning device are arranged onthe base; position sensors are arranged on the first positioning device and the second positioning device; and a groove structure is formed in one end of the base; The wafer converter further comprises a push rod and a motor which drives the push rod to slide left and right in the groove structure and formed in one end of the base; the change-over switch is connected with the position sensors andthe motor through a circuit; and the first positioning device and the second positioning device are arranged on the base, so that angular deflection of a wafer in a transferring process is avoided; and the position sensors mounted on the first positioning device and the second positioning device are convenient for workers to observe the position of the wafer in the transferring process, so that the problem of certain errors caused by manual placement and positioning is solved.

Description

technical field [0001] The invention relates to the technical field of wafer equipment, in particular to a wafer converter. Background technique [0002] In the existing wafer changer, the carrier wafer boat is placed on the side close to the pusher, and the wafer carrier to be loaded is placed on the opposite side of the wafer carrier boat. By manual means, it is confirmed whether the wafer placement is stable. correct, and then push the pusher to push the wafer into the wafer boat to be loaded to complete the placement of the wafer. There is a certain error in manual placement and positioning. Contents of the invention [0003] The technical problem solved by the present invention is to provide a wafer converter provided with a positioning device to prevent angular deviation of the wafer during the conversion process. [0004] The technical solution adopted by the present invention to solve the technical problem is: a wafer converter, including a base and a transfer swi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67259H01L21/67742
Inventor 田一李小龙田英干
Owner 天霖(张家港)电子科技有限公司