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Microelectromechanical systems gyroscope

A micro-electromechanical gyroscope and outer frame technology, applied in the field of sensors, can solve the problem that the quality block cannot be sensed

Active Publication Date: 2021-03-26
SENSORTEK TECH
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Problems solved by technology

However, the mass cannot sense the rotation parallel to the axis, so if three-axis angular velocity is to be sensed, at least two sets of masses moving in different directions must be provided. However, how to stabilize the driving mass in a tiny micro-electromechanical structure The blocks move in different directions, and the cost of the MEMS gyroscope can be controlled within a reasonable range. At the same time, it is also necessary to avoid noise and non-ideal signals from affecting the sensing results, which has become a problem that manufacturers are eager to solve.

Method used

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[0055] In order to make the structural features of the present invention and the achieved effects have a further understanding and recognition, preferred embodiments and detailed descriptions are specially used, which are described as follows:

[0056] Some terms are used in the specification and claims to refer to specific components. However, those with ordinary knowledge in the technical field of the present invention should understand that manufacturers may use different terms to refer to the same component. Moreover, this specification and The claim item does not use the difference in name as the way to distinguish the components, but the difference in the overall technology of the components as the criterion for distinguishing. "Includes", "has" and "has" mentioned throughout the specification and claims are open-ended terms, so they should be interpreted as "including but not limited to". Furthermore, the term "coupled" herein includes both direct and indirect means of ...

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Abstract

The invention related to a microelectromechanical systems gyroscope, which comprises a plurality of sensing modules sensing angular velocities on tri-axes, a plurality of outer frames set at outside of the sensing modules, and a plurality of driving shafts set between the frames respectively. The driving shafts are connected with two adjacent frames by first and second flexible connecting elements, respectively, and the frames are connected with the sensing modules by a plurality of transporting units. Thus, tri-axes sensing is provided.

Description

technical field [0001] The invention relates to a sensor, especially a micro-electromechanical gyroscope, which provides the function of measuring three-axis angular velocity. Background technique [0002] Microelectromechanical Systems (MEMS) gyroscopes are usually used to measure the rotational motion of a system on each axis in the x-y-z coordinate axis, wherein when a mass moves linearly along an axis and is subjected to an angular velocity, the mass The block can sense a Coriolis Force. The force drives the mass block to generate a displacement in a direction perpendicular to the axis, and then senses the angular velocity value of the mass block. However, the mass cannot sense the rotation parallel to the axis, so if three-axis angular velocity is to be sensed, at least two sets of masses moving in different directions must be provided. However, how to stabilize the driving mass in a tiny micro-electromechanical structure The blocks move in different directions, and t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/02
CPCG01C19/02G01C19/5762G01C19/5712
Inventor 李世伟王照勋
Owner SENSORTEK TECH
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