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A double-helical planar waveguide magnetic field sensor and its manufacturing method

A magnetic field sensor and planar waveguide technology, applied in the direction of the size/direction of the magnetic field, optical waveguide light guide, magnetic field measurement using magneto-optical equipment, etc., can solve the problems of inability to achieve uniform preparation of multiple materials, and improve the accuracy of magnetic field measurement. The effect of expanding the phase difference, increasing stability and durability

Active Publication Date: 2022-05-27
ZHEJIANG UNIV +1
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Problems solved by technology

[0005] In order to solve the problem that the existing multi-material light guide layer planar waveguide microstructure cannot realize the uniform preparation of multi-materials through the traditional planar waveguide preparation method, the present invention proposes a double helical planar waveguide magnetic field sensor and its manufacturing method

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  • A double-helical planar waveguide magnetic field sensor and its manufacturing method
  • A double-helical planar waveguide magnetic field sensor and its manufacturing method
  • A double-helical planar waveguide magnetic field sensor and its manufacturing method

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and examples. The technical features of the various embodiments of the present invention can be combined correspondingly on the premise that there is no conflict with each other.

[0025] The invention adopts the two-photon femtosecond laser direct writing technology, and establishes a 3D printing model of the double-helical planar waveguide structure according to the refractive index of the material and the geometric shape of the disc-shaped waveguide structure. The first material is used as the right rectangle in the rectangular cross section, and the length of the part in contact with the glass substrate is half of the height. After printing, the excess material is cleaned, and the second material is printed by the two-photon laser direct writing device. The second material is a rectangle The rectangle on the left side of the cross section. After printing, the excess m...

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Abstract

The invention relates to a double-helical planar waveguide magnetic field sensor and a manufacturing method thereof, belonging to the field of planar optical waveguides. The present invention adopts two-photon femtosecond laser direct writing technology, and establishes a 3D printing model according to the refractive index of the material and the geometric shape of the disc-shaped waveguide structure. The cross-section of the double-helical planar waveguide structure is rectangular. The first material is the right side rectangle in the rectangular cross-section, and the length of the part in contact with the glass substrate is half of the height. After printing, the excess part of the material is cleaned, and the second material is printed with a rectangular cross-section by using the two-photon laser direct writing device again. The left side of the rectangle, clean the excess material after printing. Compared with the existing magnetic field sensors, the double-helical planar waveguide magnetic field sensor and its manufacturing method proposed by the present invention have the advantages of easy operation, fast speed, high precision and high success rate, and have good application prospects in the field of magnetic field measurement.

Description

technical field [0001] The invention relates to the field of planar optical waveguides, in particular to a double helical planar waveguide magnetic field sensor based on a multi-material two-photon femtosecond laser direct writing technology and a manufacturing method thereof. Background technique [0002] As a non-contact measurement method, optical measurement method has become an important branch in the field of information measurement due to its advantages of high precision, small interference, and little impact on the measured object. According to the propagation process of the optical path, optical measurement methods are mainly divided into : Space optical path measurement method, optical fiber measurement method, planar optical waveguide device measurement method. Among them, the space optical path measurement cannot be used for measurement in complex environments and high precision because its space light is easily affected by environmental interference; the optical...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/032G02B6/12G02B6/125G02B6/13B33Y10/00B29C64/135
CPCG01R33/032G02B6/125G02B6/12004G02B6/13B29C64/135B33Y10/00G02B2006/12138G02B2006/12159G02B2006/12147
Inventor 梁璀张登伟冀翔舒晓武
Owner ZHEJIANG UNIV
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