Double-helix planar waveguide magnetic field sensor and manufacturing method thereof

Abstract

The invention relates to a double-helix planar waveguide magnetic field sensor and a manufacturing method thereof, and belongs to the field of planar optical waveguides. A two-photon femtosecond laser direct writing technology is adopted, a 3D printing model is established according to the refractive index of materials and the geometrical shape of a disc-shaped waveguide structure, the cross section of a double-spiral planar waveguide structure is rectangular, a first material is printed on a glass substrate to serve as a right rectangle in the rectangular cross section. The length of the part in contact with the glass substrate is half of the height, the redundant material is cleaned after printing is finished, a second material with a rectangular section on the left side is printed by using the two-photon laser direct writing device again, and the redundant material is cleaned after printing is finished. Compared with an existing magnetic field sensor, the double-helix planar waveguide magnetic field sensor and the manufacturing method thereof have the advantages of being easy to operate, high in speed, high in precision, high in success rate and the like, and have good application prospects in the field of magnetic field measurement.

Description

technical field [0001] The invention relates to the field of planar optical waveguides, in particular to a double helical planar waveguide magnetic field sensor based on multi-material two-photon femtosecond laser direct writing technology and a manufacturing method thereof. Background technique [0002] As a non-contact measurement method, the optical measurement method has become an important branch in the field of information measurement due to its advantages of high precision, low interference, and small impact on the measured object. According to the propagation process of the optical path, the optical measurement method is mainly divided into : Spatial optical path measurement method, optical fiber measurement method, planar optical waveguide device measurement method. Among them, the spatial optical path measurement cannot be used in complex environments and high-precision measurements because the spatial light is easily affected by environmental interference; the opt...

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Problems solved by technology

[0005] In order to solve the problem that the existing multi-material light guide layer planar waveguide microstructure cannot realize the uniform preparation of multi-materials through the traditional planar waveguide preparation method, the present invention proposes a double helical planar waveguide magnetic field sensor and its manufacturing method

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