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Double-helix planar waveguide magnetic field sensor and manufacturing method thereof

A magnetic field sensor and planar waveguide technology, which is applied to the size/direction of the magnetic field, the optical waveguide light guide, and the use of magneto-optical equipment for magnetic field measurement, etc. Enlarging the phase difference and overcoming the effect of the device being easily damaged

Active Publication Date: 2021-05-07
ZHEJIANG UNIV +1
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Problems solved by technology

[0005] In order to solve the problem that the existing multi-material light guide layer planar waveguide microstructure cannot realize the uniform preparation of multi-materials through the traditional planar waveguide preparation method, the present invention proposes a double helical planar waveguide magnetic field sensor and its manufacturing method

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  • Double-helix planar waveguide magnetic field sensor and manufacturing method thereof
  • Double-helix planar waveguide magnetic field sensor and manufacturing method thereof
  • Double-helix planar waveguide magnetic field sensor and manufacturing method thereof

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with accompanying drawing and example. The technical features of the various implementations in the present invention can be combined accordingly on the premise that there is no conflict with each other.

[0025] The invention adopts two-photon femtosecond laser direct writing technology, according to the refractive index of the material and the geometric shape of the disc waveguide structure, a 3D printing model of the double helical planar waveguide structure is established, the cross section of which is rectangular, and printed on the glass substrate first The first material is the right rectangle in the rectangular cross-section, and the length of the part in contact with the glass substrate is half of the height. After printing, the excess material is cleaned, and the second material is printed as a rectangle by using the two-photon laser direct writing device again. The left side of the cross-sec...

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Abstract

The invention relates to a double-helix planar waveguide magnetic field sensor and a manufacturing method thereof, and belongs to the field of planar optical waveguides. A two-photon femtosecond laser direct writing technology is adopted, a 3D printing model is established according to the refractive index of materials and the geometrical shape of a disc-shaped waveguide structure, the cross section of a double-spiral planar waveguide structure is rectangular, a first material is printed on a glass substrate to serve as a right rectangle in the rectangular cross section. The length of the part in contact with the glass substrate is half of the height, the redundant material is cleaned after printing is finished, a second material with a rectangular section on the left side is printed by using the two-photon laser direct writing device again, and the redundant material is cleaned after printing is finished. Compared with an existing magnetic field sensor, the double-helix planar waveguide magnetic field sensor and the manufacturing method thereof have the advantages of being easy to operate, high in speed, high in precision, high in success rate and the like, and have good application prospects in the field of magnetic field measurement.

Description

technical field [0001] The invention relates to the field of planar optical waveguides, in particular to a double helical planar waveguide magnetic field sensor based on multi-material two-photon femtosecond laser direct writing technology and a manufacturing method thereof. Background technique [0002] As a non-contact measurement method, the optical measurement method has become an important branch in the field of information measurement due to its advantages of high precision, low interference, and small impact on the measured object. According to the propagation process of the optical path, the optical measurement method is mainly divided into : Spatial optical path measurement method, optical fiber measurement method, planar optical waveguide device measurement method. Among them, the spatial optical path measurement cannot be used in complex environments and high-precision measurements because the spatial light is easily affected by environmental interference; the opt...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/032G02B6/12G02B6/125G02B6/13B33Y10/00B29C64/135
CPCG01R33/032G02B6/125G02B6/12004G02B6/13B29C64/135B33Y10/00G02B2006/12138G02B2006/12159G02B2006/12147
Inventor 张登伟梁璀冀翔舒晓武
Owner ZHEJIANG UNIV
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