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Gas sensor based on photoacoustic effect

A technology of gas sensor and photoacoustic effect, which is applied in the direction of instruments, scientific instruments, and material analysis through optical means, can solve the problem of low detection sensitivity and achieve the effect of high gas concentration detection sensitivity

Inactive Publication Date: 2021-05-11
于孟今
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the detection sensitivity of existing gas sensors based on the photoacoustic effect is low

Method used

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  • Gas sensor based on photoacoustic effect
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  • Gas sensor based on photoacoustic effect

Examples

Experimental program
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Effect test

Embodiment 1

[0020] The invention provides a gas sensor based on the photoacoustic effect, such as figure 1 As shown, it includes a cavity wall 1 , an air inlet 2 , an air outlet 3 , a light-transmitting hole 4 , an elastic layer 5 , an electric sensitive layer 6 , a source 7 , and a drain 8 . The chamber wall 1 includes side surfaces and a bottom surface. The air inlet 2 and the air outlet 3 are arranged on opposite sides of the chamber wall 1 . exist figure 1 Among them, the air inlet 2 is set on the left side of the cavity wall 1, and the gas outlet 3 is set on the right side of the cavity wall 1. The light-transmitting hole 4 is arranged on the side of the chamber wall 1 , and the light-transmitting hole 4 is on the same side as the air inlet 2 . The light-transmitting hole 4 is used to introduce an external laser into the cavity wall 1 . The light hole 4 is a transparent material. The elastic layer 5 covers the chamber wall 1 , and the elastic layer 5 and the chamber wall 1 enclo...

Embodiment 2

[0024] On the basis of Example 1, such as figure 2 As shown, the elastic layer 5 is thin in the middle and thick in the edges. In this way, when the gas to be measured absorbs the laser light and expands, the elastic layer 5 deforms to a greater extent, thereby changing the electrical conductivity of the electrosensitive layer 6 more, thereby realizing gas detection with higher sensitivity.

Embodiment 3

[0026] On the basis of Example 2, such as image 3 As shown, there are holes 10 in the graphene layer. In this way, the current in the graphene layer is confined to a narrower path. When the graphene layer is deformed, the current distribution in the graphene layer changes more significantly, which leads to a greater change in the conductive properties of the graphene layer, thereby achieving higher sensitivity gas detection.

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PUM

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Abstract

The invention relates to the field of gas detection, and particularly provides a gas sensor based on a photoacoustic effect, the gas sensor comprises a cavity wall, a gas inlet, a gas outlet, a light hole, an elastic layer, an electric sensitive layer, a source electrode and a drain electrode, the gas inlet and the gas outlet are arranged on opposite side surfaces of the cavity wall, the light hole is arranged on the cavity wall, the light hole and the gas inlet are arranged on the same side, the elastic layer covers the cavity wall, the elastic layer and the cavity wall define a cavity, the electric sensitive layer is arranged on the elastic layer, and the source electrode and the drain electrode are arranged on the two sides of the electric sensitive layer. The gas sensor has the advantage of high gas concentration detection sensitivity.

Description

technical field [0001] The invention relates to the field of gas detection, in particular to a gas sensor based on photoacoustic effect. Background technique [0002] Gas detection, especially selective gas detection technology has important applications in medical and industrial fields. The gas detection technology based on the photoacoustic effect has the advantage of strong selectivity, and has a good prospect in the field of gas sensing. However, the detection sensitivity of existing gas sensors based on the photoacoustic effect is low. Contents of the invention [0003] In order to solve the above problems, the present invention provides a gas sensor based on the photoacoustic effect, including a cavity wall, an air inlet, an air outlet, a light-transmitting hole, an elastic layer, an electric sensitive layer, a source electrode, a drain electrode, an air inlet The air outlet is arranged on the opposite side of the chamber wall, the light-transmitting hole is arrang...

Claims

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Application Information

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IPC IPC(8): G01N21/17
CPCG01N21/17
Inventor 不公告发明人
Owner 于孟今
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