Angle-adjustable high-precision objective table device

Abstract

The invention relates to an angle-adjustable high-precision objective table device, in the angle-adjustable high-precision objective table device, a base and an objective table are supported through a fixed supporting column and two movable supporting columns in a three-point mode, two sliding rods are respectively driven by two driving mechanisms, so that the slope surfaces at the front ends of sliding rods jack two jacking balls to different heights, the pose of the objective table is adjusted, and as the balls and the jacking balls are in rolling friction with moving parts, the friction force is small, the balls and the jacking balls do not move, and the pose of the objective table is adjusted smoothly and stably. Therefore, according to the angle-adjustable high-precision objective table device, the pose of the objective table can be conveniently adjusted, the structure is simple, and movement is stable and smooth.

Description

technical field [0001] The invention relates to a high-precision stage device with adjustable angle, in particular to a stage device used for high-precision instruments such as microscopes. Background technique [0002] In high-precision instruments such as microscopes, the stage is an important device. The leveling and angle adjustment of the stage are very important. It is difficult to accurately control the accuracy by manual adjustment in the prior art, and it is easy to cause movement. For high-precision instruments, a slight movement will make the movement on the stage The object deviates substantially from the target pose. It is difficult to flexibly and conveniently adjust the inclination angle of the object stage in the prior art, the structure is complex, the adjustment is inconvenient, and it is easy to cause movement. Contents of the invention [0003] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to prov...

AI Technical Summary

Problems solved by technology

The leveling and angle adjustment of the stage are very important. It is difficult to accurately control the accuracy by manual adjustment in the prior art, and it is easy to cause movement. For high-precision instruments, slight movement will make the movement on the stage The object deviates greatly from the target pose

The stage in the prior art is difficult to adjust the inclination angle of the stage flexibly and conveniently, the structure is complicated, the adjustment is inconvenient and it is easy to cause movement

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