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MEMS electric field measuring device with automatic cleaning function

A technology of automatic cleaning and electric field measurement, applied in electrostatic field measurement and other directions, can solve problems such as affecting measurement accuracy

Pending Publication Date: 2021-05-18
BEIJING INFORMATION SCI & TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is that the MEMS electric field measurement structure is easily affected by dust in the external environment without encapsulation, and the encapsulation also affects the measurement accuracy.

Method used

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  • MEMS electric field measuring device with automatic cleaning function

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Embodiment 1

[0024] Step 1: Under the control of the control circuit, the shielding electrode is driven by the shielding electrode driving electrode to reciprocate along the shielding electrode support, and the movement frequency is frequency 1. In this example, the movement frequency 1 can be the resonance frequency of the shielding electrode and the sensing electrode 4kHz, At the same time, the sensing electrode moves reciprocatingly along the sensing electrode support under the drive of the sensing electrode driving electrode, and the movement frequency is frequency 1 (resonance frequency 4kHz);

[0025] Step 2: Under the premise of step 1, the device works in the measurement mode, and the signal conditioning circuit amplifies, filters and outputs the induced current output by the sensing electrode, so as to realize the conditioning output of the induced signal;

[0026] Step 3: After step 1 and step 2 last for 5 seconds, under the control of the control circuit, the shielding electrode ...

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Abstract

The invention discloses an MEMS electric field measuring device with an automatic cleaning function, which is not sealed by a packaging structure, but adopts a shielding electrode and an induction electrode to move, and has a high-frequency reciprocating motion function, and the automatic cleaning function of the device is realized through the high-frequency reciprocating motion. The problems that an MEMS electric field measurement structure is not packaged and is easily influenced by dust in an external environment, and the measurement precision is influenced by packaging are solved.

Description

technical field [0001] The invention relates to an electric field measuring device, in particular to a MEMS electric field measuring device with an automatic cleaning function, belonging to the field of electric field measurement. Background technique [0002] Electrostatic field measurement can be used in lightning warning, static monitoring and protection, and target detection. There are mainly direct induction measurement method, vibration capacitance measurement method, rotary vane measurement method and MEMS electric field measurement method. Among them, the direct induction measurement method cannot continuously measure, and the measurement accuracy of the vibration capacitance method is restricted by many factors. The measurement method is more accurate and can be continuously measured, but the volume is relatively large. The MEMS electric field measurement method has the advantages of small volume and high accuracy. [0003] The principle of MEMS electric field meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/12
CPCG01R29/12
Inventor 唐凯郎需强
Owner BEIJING INFORMATION SCI & TECH UNIV