A device and method for detecting the radius of curvature of an aspheric mirror
A technology of curvature radius and aspheric surface, which is applied in the field of aspheric mirror curvature radius detection device and CGH compensator, which can solve the problems of weak anti-interference ability, complex measurement system device, and unsuitable measurement of curvature radius of aspheric surface center point, etc.
Active Publication Date: 2022-02-11
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
Laser interferometry is currently the most widely used method for measuring the radius of curvature, but its light path is easily affected by the detection environment and its anti-interference ability is weak
The laser differential confocal method applies the principle of differential confocal to the measurement of the radius of curvature. This method has higher precision than other methods, but the measurement system is complicated and can only be used to measure the radius of curvature of a spherical surface. The measurement of the radius of curvature of the center point of the sphere is not applicable
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[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0032] The object of the present invention is to provide a CGH compensator, and use the device and method for detecting the radius of curvature of the aspheric mirror to detect the radius of curvature of the sphere, aspheric surface, and apex of the aspheric surface. A device and method for detecting the radius of curvature of an aspheric mirror provided by the present invention will be described in detail below through specific embodiments.
[0033] The device for measuring the radius of curvature of an optical element of the present invention mainly includes an interferometer 1, a CG...
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The invention belongs to the technical field of mirror detection, and provides a CGH compensator and an aspheric mirror curvature radius detection device based on the CGH compensator, which detects the aspheric mirror with a hole in the center. By obtaining the surface shape error and defocus amount of the mirror to be inspected, the curvature radius error of the mirror to be inspected is calculated according to the defocus amount, and the measured values of each area are synthesized using the curvature error formula to obtain the curvature radius error and the curvature of the mirror to be inspected radius.
Description
technical field [0001] The invention belongs to the technical field of mirror surface detection, and in particular relates to a CGH compensator, which uses the CGH compensator to realize an aspheric mirror curvature radius detection device and method. Background technique [0002] The radius of curvature is one of the important parameters of optical components, and its accuracy affects the performance of the optical system. The measurement accuracy of the radius of curvature directly affects other optical parameters, thereby affecting the imaging quality of the optical system. Therefore, the high-precision measurement of the radius of curvature of the optical element is an extremely important link. However, there are many factors that affect the measurement accuracy of the radius of curvature, so high-precision measurement of the radius of curvature has always been a difficult problem in optical inspection. [0003] There are many methods for measuring the radius of curvat...
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IPC IPC(8): G01B11/255
CPCG01B11/255
Inventor 胡海翔张鑫程强薛栋林张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI