Six-degree-of-freedom magnetic levitation platform device and control method thereof
A technology of control method and degree of freedom, applied in the direction of electromechanical devices, magnetic circuits, electrical components, etc., to achieve the effect of simple control method and simple structure
Active Publication Date: 2021-06-08
FUDAN UNIV +1
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Problems solved by technology
The increase in stroke and the requirement of productivity put forward high requirements on the speed, acceleration and positioning accuracy of the motion table; at the same time, the convenience of maintenance of the motion table, as well as the difficulty of manufacturing and the controllability of cost must be considered. A series of requirements have brought great challenges and tests to the existing technical methods
Method used
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Embodiment 1
[0046] see Figure 1 to Figure 4 , this embodiment provides a six-degree-of-freedom maglev platform device, including a support frame 2, a moving frame 1, and a maglev drive mechanism, and the support frame 2 includes a first support frame 2-1, a second support frame 2-2 and a second support frame 2-2. Three support frames 2-3, wherein the second support frame 2-2 is fixed to the first support frame 2-1 at a first predetermined angle, and the third support frame 2-3 is fixed at a second predetermined angle In the first supporting frame 2-1, the supporting frame 2 is fixed, and the moving frame 1 is at least partially arranged in the supporting frame 2;
[0047] The maglev drive mechanism includes a first drive unit 1-1, a second drive unit 1-2 and a third drive unit 1-3, and the first drive unit 1-1 is arranged on the first support frame 2-1 Between the mobile frame 1, the second drive unit 1-2 is arranged between the second support frame 2-2 and the mobile frame 1, and the t...
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The invention discloses a six-degree-of-freedom magnetic levitation platform device which comprises a supporting frame, a moving frame and a magnetic levitation driving mechanism, the supporting frame comprises a first supporting frame, a second supporting frame and a third supporting frame, and the magnetic levitation driving mechanism comprises a first driving unit, a second driving unit and a third driving unit. Each driving unit comprises a stator fixed to the corresponding supporting frame and a rotor matched with the stator. The invention further discloses a control method of the magnetic levitation platform. By means of the first driving unit, the second driving unit and the third driving unit which are arranged respectively, the energization of the driving units or the direction, amplitude and phase of driving current of coils in the driving units are selectively controlled, the translation and rotation of the moving frame can be achieved, namely, six-degree-of-freedom movement is provided, and compared with the prior art, the method has the advantages of simple structure and simple control strategy.
Description
technical field [0001] The invention relates to a maglev platform device, which is applied in the field of automation equipment. Background technique [0002] Microelectronics technology is a new technology developed along with integrated circuits, especially VLSI. Microelectronics technology is the core technology of high-tech and information industry, and has penetrated into various fields of modern technology and social life. With the rapid development of microelectronics technology, the demand for automation equipment is increasing, and higher requirements are put forward for the performance and production capacity of automation equipment. [0003] In the field of automation equipment manufacturing, the large-travel motion table technology is the core technology of the automation equipment manufacturing system, and has been highly valued by the industry. The performance and production capacity of automation equipment also put forward higher requirements for the speed, ...
Claims
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IPC IPC(8): H02K41/035
CPCH02K41/035H02K2201/18
Inventor 丁晨阳彭仁强杨晓峰
Owner FUDAN UNIV