Variable compensation interference detection system and method for large-gradient phase-type highlight element
An interference detection and phase element technology, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems affecting the development of Shenguang series strong laser devices and restricting the design and processing of large gradient phase type strong light components to be measured. Achieve the effect of solving the problem of large phase gradient nanoscale detection and improving the adaptability of wavefront gradient
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[0026] The large gradient phase type strong light element to be tested has a diameter of 320mm, and the design phase is as follows: figure 1 As shown, the gradient amplitude can reach up to 5 μm / cm. The following will take the large-gradient phase-type high-light element 3 to be tested as an example to further describe in detail the variable compensation interference detection system and method of the large-gradient phase-type high-light element of the present invention.
[0027] Such as figure 2 As shown, the variable compensation interference detection system of the large gradient phase type strong light element in this embodiment includes a wavefront interferometer 1, a standard lens 2, a large gradient phase type strong light element 3 to be measured, a beam expander system 4, and an SLM (Spatial LightModulator , spatial light modulator) 5, SLM phase control system 6 and translation stage 7, the optical path of the standard lens 2 of the wavefront interferometer 1 sequen...
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