A variable compensation interference detection system and method for a large gradient phase strong light element
A technology of interference detection and phase type, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems that restrict the design and processing of large gradient phase type strong light components to be measured, and affect the development of Shenguang series strong laser devices, etc. Achieve the effect of solving the problem of large phase gradient nanoscale detection and improving the adaptability of wavefront gradient
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[0026] The large gradient phase type strong light element to be tested has a diameter of 320mm, and the design phase is as follows figure 1 As shown, the gradient amplitude can be up to 5 μm / cm. The following will take the large gradient phase type strong light element 3 to be tested as an example to further describe the variable compensation interference detection system and method of the large gradient phase type strong light element of the present invention.
[0027] like figure 2 As shown, the variable compensation interference detection system of the large gradient phase type strong light element in this embodiment includes a wavefront interferometer 1, a standard lens 2, a large gradient phase type strong light element to be measured 3, a beam expander system 4, SLM (Spatial Light Modulator) , spatial light modulator) 5, SLM phase control system 6 and translation stage 7, the optical path of the standard lens 2 of the wavefront interferometer 1 passes through the large...
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