Plasma current calculation method and device
A plasma and current calculation technology, applied in the field of data processing, can solve the problems of low calculation accuracy of plasma current, achieve the effects of improving inversion accuracy, optimizing model structure, and improving calculation accuracy
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[0056] Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.
[0057] Such as figure 1 As shown, this embodiment proposes a plasma current calculation method, which may include the following steps:
[0058] S101. Obtain external diagnostic data of plasma current, where the plasma current exists in the current plasma current region in the inner vacuum chamber;
[0059] Wherein, the plasma current region may be a region containing plasma current in the inner vacuum. It should be noted that there may be no ...
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