A vertically integrated unit light emitting diode
A technology of light-emitting diodes and integrated units, applied in electrical components, semiconductor devices, nanotechnology, etc., can solve the problems of LED light efficiency, heat dissipation and stability limitations, and achieve improved light extraction efficiency, large heat dissipation area, and increased effective light output area effect
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Embodiment 1
[0060] This embodiment provides a vertically integrated unit light emitting diode, including: a second conductivity type electrode 1, an integral mesa structure 6 composed of a diode unit mesa structure, a trench 7 and a diode unit 8, a second conductivity type electrode line 9, a pad 11. The second conductive type electrode 1 is an N-type conductive electrode. The width of the trench is 0.1 micron and the depth is 0.01 micron, the trench is located between the diode units, and there are linear electrode lines laid in the trench. The N-type conductive electrode is in ohmic contact with the top of the diode unit and is connected to the pad through a bar-shaped electrode line. The number of pads is 1, and the shape is an irregular polygon with an arc edge, which is located on the short edge of the mesa structure. The pads are 0.1 microns thick and 50 microns wide.
[0061] like image 3 As shown, the overall mesa structure includes 6 rows of 102 triangular diode unit mesas of...
Embodiment 2
[0068] This embodiment provides a vertically integrated unit light emitting diode, such as Figure 8 As shown, it includes: a second conductive type electrode 1, an overall mesa structure 6, a trench 7, a diode unit 8, a second conductive type electrode line 9 and a pad 11, and the second conductive type electrode 1 is an N-type conductive electrode. The trench has a width of 1 micron and a depth of 0.1 micron. The trench structure is located between the diode units. Linear electrode lines are laid in the trench. The electrode lines have a width of 0.1 to 1 micron and a thickness of 0.1 to 1 micron. The N-type conductive electrode is in ohmic contact with the top of the diode unit and is connected to the pad through a bar-shaped electrode line. The number of pads is 1, the shape is a rectangle with rounded corners, located in the middle of the mesa, the thickness of the pad is 1 micron, and the width is 5 microns.
[0069] The chip includes a total of 52 diode units in 6 rows...
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