Preparation process of ultra-black high-performance Ti-DLC coating

A preparation process, high-performance technology, applied in the field of sputtering coating, can solve the problems of poor thermal stability, poor thermal stability of the film, large internal stress, etc., to achieve the effect of excellent coating performance and extended application range

Active Publication Date: 2021-07-02
ANHUI CHUNYUAN COATING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 2) Large internal stress
[0005] 3) Poor thermal stability
Hydrogen-containing DLC ​​films are less thermally stable than hydrogen-free DLC films, sp 3 DLC films with low bond content than sp 3 Films with high bond content are less thermally stable

Method used

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  • Preparation process of ultra-black high-performance Ti-DLC coating
  • Preparation process of ultra-black high-performance Ti-DLC coating
  • Preparation process of ultra-black high-performance Ti-DLC coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Such as figure 1 Shown:

[0030] 1) The pump set pumps air to the vacuum chamber

[0031] Clamp the workpiece after surface cleaning on the special fixture, turn on the rotary vane pump to pump the vacuum to 10Pa after the workpiece enters the vacuum chamber, and turn on the molecular pump to pump the air pressure to 1×10 -2 Pa.

[0032] 2) Vacuum heating for 1h

[0033] Fill the vacuum chamber with 0sccmAr, the air pressure is 1×10 -2 Pa, turn on the vacuum chamber heater and the magnetic filter power supply, set the heating temperature to 350°C for 0.5h.

[0034] Function: The chamber heater is mainly used to desorb gas molecules such as water vapor attached to the inner wall of the chamber, lining board, turret, and workpiece. The heat generated by the magnetic filter power supply can cool the inner wall of the magnetic filter elbow and the bellows bush Carry out baking degassing. The effects of filling the vacuum chamber with Ar mainly include: first, the des...

Embodiment 2

[0053] Such as figure 1 Shown:

[0054] 1) The pump set pumps air to the vacuum chamber

[0055] Clamp the workpiece after surface cleaning on the special fixture, turn on the rotary vane pump to pump the vacuum to 20Pa after the workpiece enters the vacuum chamber, and turn on the molecular pump to pump the air pressure to 9×10 -2 Pa.

[0056] 2) Vacuum heating for 1h

[0057] Fill the vacuum chamber with 500 sccmAr, the air pressure is 3×100Pa, turn on the vacuum chamber heater and the magnetic filter power supply, set the heating temperature to 260°C for 0.75h.

[0058] Function: The chamber heater is mainly used to desorb gas molecules such as water vapor attached to the inner wall of the chamber, lining board, turret, and workpiece. The heat generated by the magnetic filter power supply can cool the inner wall of the magnetic filter elbow and the bellows bush Carry out baking degassing. The effects of filling the vacuum chamber with Ar mainly include: first, the des...

Embodiment 3

[0077] Such as figure 1 Shown:

[0078] 1) The pump set pumps air to the vacuum chamber

[0079] Clamp the workpiece after surface cleaning on the special fixture, turn on the rotary vane pump to pump the vacuum to 28Pa after the workpiece enters the vacuum chamber, and turn on the molecular pump to pump the air pressure to 5×10 -2 Pa.

[0080] 2) Vacuum heating for 1h

[0081] Fill the vacuum chamber with 250 sccmAr, the air pressure is 1.5×100Pa, turn on the vacuum chamber heater and magnetic filter power supply, set the heating temperature to 200°C for 1.5h.

[0082] Function: The chamber heater is mainly used to desorb gas molecules such as water vapor attached to the inner wall of the chamber, lining board, turret, and workpiece. The heat generated by the magnetic filter power supply can cool the inner wall of the magnetic filter elbow and the bellows bush Carry out baking degassing. The effects of filling the vacuum chamber with Ar mainly include: first, the desorb...

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Abstract

The present invention relates to a preparation process of an ultra-black high-performance Ti-DLC coating. The preparation process includes the steps: placing a workpiece in a vacuum chamber, carrying out air exhaust treatment on the vacuum chamber, carrying out impurity removal treatment on the vacuum chamber and/or the workpiece after the air exhaust treatment, filling the vacuum chamber with Ar after the impurity removal treatment, and preparing a priming layer on the surface of the workpiece by adopting a twin Ti target of a medium-frequency power supply; after the priming layer is prepared, additionally filling the vacuum chamber with C2H2, preparing a transition layer on the priming layer, and carrying out change by regulating and controlling preparation parameters of the transition layer according to requirements in a preparation process of the transition layer, wherein the preparation parameters, which are regulated and controlled for change, of the transition layer include one or more of an Ar filling amount, a C2H2 filling amount, a bias voltage of the workpiece and a voltage of the Ti target; and after the transition layer is prepared, carrying out further coating by keeping each of the preparation parameters of the transition layer stable, thereby preparing a stable color layer on the transition layer. According to the above-mentioned solution provided by the present invention, the prepared coating is excellent in performance, a L value of a DLC is lower than 30, and the application range can be effectively widened.

Description

technical field [0001] The invention relates to the field of sputtering coating, in particular to a preparation process of an ultra-black high-performance Ti-DLC coating. Background technique [0002] The diamond-like carbon (DLC) film is a diamond phase (sp 3 key or sp 3 hybrid state) amorphous carbon film. The carbon atoms in it are partly in the sp of the diamond 3 Hybrid state, partly in the sp of graphite 2 hybridized state, but also a very small number of sp 1 Hybrid state, with sp 3 A diamond-like carbon film mainly bonded (more than 70%) is also called a tetrahedral amorphous carbon (Tetrahedral Amorphous Carbon, ta-C) film. Diamond-like carbon film not only has high hardness, high thermal conductivity and low coefficient of friction, but also has excellent corrosion resistance, optical transparency and biocompatibility, and is an ideal choice in the fields of machinery, electronics, automobiles, aviation, medicine, optics, etc. Ideal material. Although the D...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34C23C14/02C23C14/14
CPCC23C14/0605C23C14/0057C23C14/3464C23C14/025C23C14/14C23C14/0015
Inventor 张心凤夏正卫李灿民范洪跃
Owner ANHUI CHUNYUAN COATING TECH CO LTD
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