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Pumping unit

A pumping, Roots vacuum pump technology, applied in the direction of pump components, pumps, pumping device components for elastic fluids, etc., can solve problems such as complex, time-consuming maintenance, difficult to remove pipelines between pumps, etc.

Pending Publication Date: 2021-07-23
PFEIFFER VACUUM GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to its restricted position between the pumps and due to its large size, it is difficult to remove the inter-pump line without removing at least one of the two pumps, making it necessary to remove the at least one
[0005] Therefore, in addition to frequent maintenance, maintenance is also relatively time-consuming and complicated

Method used

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Examples

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Embodiment Construction

[0047] The following embodiments are examples. Although the description refers to one or more embodiments, this does not necessarily mean that every label refers to the same embodiment, or that a feature applies to only one embodiment. Simple features of different embodiments may also be combined or exchanged in order to provide further embodiments.

[0048] A roughing vacuum pump is a positive displacement vacuum pump configured with two rotors for the suction, transport and subsequent delivery of the gas to be pumped at atmospheric pressure. The rotor is carried by two shafts which are driven in rotation by the motor of the roughing vacuum pump.

[0049] A Roots vacuum pump (also known as a "Roots blower") is a positive displacement vacuum pump configured to use a Roots rotor for the suction, transport and subsequent delivery of the gas to be pumped. The Roots vacuum pump is installed upstream of the rough vacuum pump and connected in series with the rough vacuum pump. The ...

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Abstract

The invention relates to a pumping unit comprising a primary vacuum pump; a Roots-type vacuum pump (3) comprising a pumping stage (7) having a stator (9) inside of which two Roots rotors (5) are configured to rotate synchronously in the opposite directions in order to drive a gas to be pumped between an inlet port (10) and an outlet port (11); a line (13) connecting the outlet port (11) to a suction port (12) of the primary vacuum pump (2), and characterised in that the smallest distance (d) between one edge of the outlet port (11) and each of the rotors (5) in the pumping stage (7) is at least less than three centimetres.

Description

technical field [0001] The invention relates to a pumping unit with a roughing vacuum pump and a Roots vacuum pump, which is installed in series with the roughing vacuum pump and upstream of the roughing vacuum pump in the direction of flow of the gas to be pumped. Background technique [0002] Some pumping units are used in processes known as "powder" processes because they involve gases that produce large amounts of solid by-products. This is the case, for example, with some methods of making semiconductors. [0003] These solid compounds can deposit on the inner surfaces of the vacuum pump and form agglomerates that ultimately limit the channel size for the gas, resulting in a loss of pumpability. [0004] The accumulation of these powders is relatively fast compared to the lifetime of the vacuum pump, thereby limiting the lifetime of the pump without maintenance operations. The lines connecting the two vacuum pumps are particularly prone to deposits, especially if they...

Claims

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Application Information

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IPC IPC(8): F04C25/02F04C29/04F04C18/12F04C23/00
CPCF04C18/126F04C23/005F04C25/02F04C29/042F04C2250/102F04C2280/02F04C2240/10F04C2240/20F04C29/04F04C29/12F04C2220/10F04C2240/806F04C23/00F04C23/003
Inventor S·布兰多林M·鲁斯科尼J·瓦朗坦Y·格勒尼耶
Owner PFEIFFER VACUUM GMBH
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