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Physical quantity sensor, electronic apparatus, and vehicle

A technology of physical quantity sensor and moving body, which is applied in the field of electronic equipment, moving body and physical quantity sensor, and can solve the problem of insufficient movable body

Pending Publication Date: 2021-08-31
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in such a structure, it is not sufficient to sufficiently improve the mechanical strength of the movable body.

Method used

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  • Physical quantity sensor, electronic apparatus, and vehicle
  • Physical quantity sensor, electronic apparatus, and vehicle
  • Physical quantity sensor, electronic apparatus, and vehicle

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0058] First, the physical quantity sensor according to the first embodiment of the present invention will be described.

[0059] figure 1 It is a plan view showing the physical quantity sensor according to the first embodiment of the present invention. figure 2 yes figure 1 The A-A line sectional view in. image 3 is showing figure 1 A top view of electrodes included in the shown physical quantity sensor. Figure 4 yes figure 1 The BB line sectional view in. Figure 5 is a schematic diagram used to illustrate damping. Figure 6 is a graph showing the relationship between S0 and damping. Figure 7 It is a graph showing the relationship between S1 / S0 and the sensitivity ratio and damping ratio. Figure 8 to Figure 16 is a graph showing the relationship between structure thickness and hole size. Figure 17 to Figure 23 It is a graph showing the relationship between S0min, S1min and H, h. Figure 24 It is a graph showing the relationship between the frequency of the vi...

no. 2 approach

[0176] Figure 37 It is a plan view showing the physical quantity sensor according to the second embodiment of the present invention.

[0177] This embodiment is the same as the above-mentioned first embodiment except that the opening shape of the through-hole 30 is different. In the following description, regarding this embodiment, differences from the above-described embodiment will be mainly described, and descriptions of the same matters will be omitted. In addition, in Figure 37 In , the same reference numerals are assigned to the same components as those in the above-mentioned embodiment.

[0178] Such as Figure 37 As shown, the opening shapes of the plurality of through-holes 30 formed in the first region R1 are circular in plan view. The plurality of through holes 30 are uniformly arranged throughout the entire first region R1. In addition, the plurality of through-holes 30 are regularly arranged in plan view, and particularly in the present embodiment, the X-ax...

no. 3 approach

[0187] Figure 38 It is a plan view showing the physical quantity sensor according to the third embodiment of the present invention.

[0188] This embodiment is the same as the aforementioned first embodiment except that the opening shape of the through hole 30 is different. In the following description, regarding this embodiment, differences from the above-described embodiment will be mainly described, and descriptions of the same matters will be omitted. In addition, in Figure 38 In , the same reference numerals are assigned to the same components as those in the above-mentioned embodiment.

[0189] Such as Figure 38 As shown, the opening shapes of the plurality of through-holes 30 formed in the first region R1 are regular pentagons in plan view. The plurality of through holes 30 are uniformly arranged throughout the entire first region R1. In addition, the plurality of through-holes 30 are regularly arranged in a plan view, and especially in the present embodiment, t...

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PUM

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Abstract

A physical quantity sensor which is not liable to damage, an electronic apparatus, and a vehicle. The physical quantity sensor includes, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a substrate; and a moving member facing the substrate in the third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first region that has a plurality of penetration holes penetrating the moving member in the third direction and having a square opening shape as viewed from the third direction, and a second region having no penetration hole. At least one of a length in the first direction and a length in the second direction of the second region is equal to or greater than S0+2*S1, wherein S0 is a length of one side of the penetration hole, and S1 is a space between the penetration holes next to each other.

Description

technical field [0001] The present invention relates to a physical quantity sensor, electronic equipment, and a mobile body. Background technique [0002] For example, the acceleration sensor described in Patent Document 1 has: a substrate; a fixed part fixed to the substrate; a movable body connected to the fixed part via a beam; generated electrostatic capacitance. When acceleration is applied from the direction in which the movable body overlaps with the fixed detection electrode, the movable body swings in a levered manner with the beam as the axis of rotation. Accompanied by this, the distance between the movable body and the fixed detection electrode changes. Capacitance changes. Therefore, the acceleration sensor described in Patent Document 1 can detect acceleration based on changes in electrostatic capacitance. [0003] In addition, the acceleration sensor described in Patent Document 1 has a protrusion protruding from the substrate, and when an excessive acceler...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01P15/08
CPCG01P15/125G01P15/0802G01P2015/0871G01P2015/0831G01P15/18G01P2015/0882B81B3/0008B81B3/001B81B2201/0242B81B2203/058
Inventor 田中悟
Owner SEIKO EPSON CORP