On-chip directed rectifying metasurface and its design method based on cascaded nanostructures
A microstructure and metasurface technology, applied in the field of micro-nano optics
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[0033] This embodiment is a specific design process of an on-chip optical directional rectification metasurface.
[0034] As an example, first determine the rectifying metasurface as an on-chip metasurface, such as Figure 1-2 As shown, the semi-elliptical silver structure is used as the first layer of the rectifying structure, the isosceles trapezoidal silver structure is used as the second layer of the rectifying structure, silicon dioxide is used as an optical waveguide to propagate the light source in the visible light band, and the silver base layer is used to ensure Light does not leak in the -z direction as it propagates in the visible waveguide. The semi-elliptical silver structure with a period of 3.2 μm in the first layer can focus surface waves incident at different angles on the chip at a wavelength of 500 nm, where image 3 The wavefront shaping of surface waves by semielliptical silver structures is characterized. The second layer of isosceles trapezoidal silve...
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