Multi-device graded embedding packaging substrate and manufacturing method thereof
A technology for packaging substrates and devices, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc. Buried packaging quality and other issues
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[0066] refer to figure 2 , shows a schematic cross-sectional view of the embedded packaging substrate 100 . The package substrate 100 includes a first dielectric layer 101 , a second dielectric layer 102 above the first dielectric layer 101 and a third dielectric layer 103 below the first dielectric layer 101 . The first dielectric layer 101, the second dielectric layer 102 and the third dielectric layer 103 may comprise the same material or different materials; they may comprise organic dielectric materials, inorganic dielectric materials or combinations thereof, preferably , polyimide, epoxy resin, bismaleimide triazine resin (BT), ceramic filler, glass fiber or their combination. Divided according to functional requirements, the dielectric material can be selected from photosensitive materials and non-photosensitive materials.
[0067] The first dielectric layer 101 includes a first conductive copper column layer 1012 penetrating through the first dielectric layer 101 in...
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