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Multi-device graded embedding packaging substrate and manufacturing method thereof

A technology for packaging substrates and devices, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc. Buried packaging quality and other issues

Active Publication Date: 2021-09-28
ZHUHAI ADVANCED CHIP CARRIERS & ELECTRONICS SUBSTRATE SOLUTIONS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For traditional board-level embedded packaging substrates, the most common method for embedding multiple chips and other components is to spread all the components horizontally for one-time embedding. It is difficult to integrate chips and other components through a free design. Embedded packaging at the most reasonable substrate layer; traditional board-level embedded packaging methods mostly embed multiple chips and other components on the same layer at one time, which requires that the thickness difference between chips and other components cannot Too large, otherwise it will affect the quality of embedded packaging; especially for components with I / O on both sides that need to be fan-out, if the thickness difference is too large, it is difficult to achieve I / O fan-out of components with smaller thickness

Method used

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  • Multi-device graded embedding packaging substrate and manufacturing method thereof
  • Multi-device graded embedding packaging substrate and manufacturing method thereof
  • Multi-device graded embedding packaging substrate and manufacturing method thereof

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Embodiment Construction

[0066] refer to figure 2 , shows a schematic cross-sectional view of the embedded packaging substrate 100 . The package substrate 100 includes a first dielectric layer 101 , a second dielectric layer 102 above the first dielectric layer 101 and a third dielectric layer 103 below the first dielectric layer 101 . The first dielectric layer 101, the second dielectric layer 102 and the third dielectric layer 103 may comprise the same material or different materials; they may comprise organic dielectric materials, inorganic dielectric materials or combinations thereof, preferably , polyimide, epoxy resin, bismaleimide triazine resin (BT), ceramic filler, glass fiber or their combination. Divided according to functional requirements, the dielectric material can be selected from photosensitive materials and non-photosensitive materials.

[0067] The first dielectric layer 101 includes a first conductive copper column layer 1012 penetrating through the first dielectric layer 101 in...

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Abstract

The invention discloses a multi-device graded embedding packaging substrate. The packaging substrate comprises a first dielectric layer, a second dielectric layer and a third dielectric layer, the first dielectric layer comprises a first conduction copper column layer and a first device placing opening frame, and the second dielectric layer comprises a first wiring layer located in the lower surface of the second dielectric layer. A second conduction copper column layer and a heat dissipation copper block layer are arranged on the first wiring layer, the third dielectric layer comprises a second wiring layer, a third conduction copper column layer is arranged on the second wiring layer, the first wiring layer and the second wiring layer are in conduction connection through the first conduction copper column layer, a first device is mounted at the bottom of the first device placing opening frame, and a terminal of the first device is conductively connected with the second wiring layer. A second device placing opening frame penetrating through the first dielectric layer, the second dielectric layer and the third dielectric layer is further included, a second device is mounted at the bottom of the second device placing opening frame, and the thickness difference exists between the second device and the first device. The invention further discloses a manufacturing method of the multi-device graded embedding packaging substrate.

Description

technical field [0001] The invention relates to an electronic device packaging structure, in particular to a multi-device embedded packaging substrate and a manufacturing method thereof. Background technique [0002] With the increasing development of electronic technology, the demand for electronic products tends to be highly functional and miniaturized. As the miniaturization of chips is approaching the limit, how to reasonably package multiple chips and other components to achieve high functionality and miniaturization has become an important research topic in the current industry. At the same time, due to cost and efficiency considerations, panel-level packaging has also become a current trend. In the process of making the substrate, components such as chips are embedded in the substrate, which can effectively reduce the packaging volume and improve output efficiency. , At the same time, compared with wafer-level packaging, the cost is greatly reduced. After continuous...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/498H01L23/31H01L25/16H01L21/50H01L21/52H01L21/56H01L21/60
CPCH01L23/49838H01L23/49822H01L23/3121H01L25/16H01L21/50H01L21/52H01L21/56H01L24/82H01L2224/82H01L2224/96H01L2224/2518H01L2224/04105H01L23/5389H01L23/3677H05K1/185H05K3/4661H01L24/19H01L24/96H01L24/20H01L25/0655H01L23/5386H01L23/12H01L23/5384H01L25/50H01L23/49894H01L21/486H01L21/4853H01L21/4857H01L21/6835H01L23/5383H01L2221/6835H01L2224/214H01L2224/215H01L2924/01029
Inventor 陈先明冯磊黄本霞洪业杰
Owner ZHUHAI ADVANCED CHIP CARRIERS & ELECTRONICS SUBSTRATE SOLUTIONS TECH