High-resolution inspection device using bezier beam

A Bessel beam, high-resolution technology, applied in the field of high-resolution inspection devices using Bessel beams, can solve the problem of reducing the proportion of terahertz waves passing through the inspection object, unable to accurately inspect the inspection object, and unable to obtain High-resolution images, etc., to achieve the effects of miniaturization, increased contrast, and increased resolution

Pending Publication Date: 2021-10-01
KOREA FOOD RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0020] In addition, the depth of focus of the Bessel beam cannot reach the end of the object to be inspected, so there is a problem that high-resolution images cannot be obtained
[0021] In addition, if the object to be inspected contains a large amount of water, since the terahertz wave is easily absorbed by water, the ratio of the terahertz wave to pass through the object to be inspected will be significantly reduced.
According to this, the signal of the terahertz wave detected by the terahertz wave detection unit is weak, so there is a problem that the object to be inspected cannot be accurately inspected.

Method used

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  • High-resolution inspection device using bezier beam
  • High-resolution inspection device using bezier beam
  • High-resolution inspection device using bezier beam

Examples

Experimental program
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Embodiment Construction

[0102]Hereinafter, specific contents for implementing the invention will be described in detail with reference to the drawings.

[0103] figure 1 It is a diagram for explaining a high-resolution inspection device using a terahertz wave Bessel beam related to an embodiment of the present invention.

[0104] refer to figure 1 , the high-resolution inspection device 100 using a Bessel beam includes a scanner 110, a terahertz wave optical head 120, an inspection target object 130, a terahertz wave focusing head 140, a first transport unit 150, and a second transport unit 160.

[0105] The scanner 110 can scan the shape of an inspection target object.

[0106] The terahertz wave optical head 120 generates terahertz waves, and can irradiate the inspection target object 130 with the generated terahertz waves.

[0107] The terahertz wave focusing head 140 can detect the terahertz wave transmitted through the inspection target object 130 .

[0108] The first transport unit 150 may...

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Abstract

According to one embodiment of the present invention, a terahertz wave concentrating module can comprise: a first lens for changing a terahertz wave, which is emitted while a terahertz Bessel beam penetrates an object to be inspected, so as to have a small angle; and a second lens for concentrating, on a detector, the terahertz wave having passed through the first lens.

Description

[0001] This application is a Chinese invention patent application number 201680090562.7, the invention name is "high-resolution terahertz wave concentrating module, scattered light detection module and high-resolution inspection device using terahertz Bessel beam", and entered the national stage of China It is a divisional application of the patent application on April 30, 2019. technical field [0002] The present invention is a technique for inspecting an object to be inspected by a non-destructive method using a terahertz wave, and relates to a high-resolution terahertz wave focusing module with a high resolution below a wavelength beyond the diffraction limit. [0003] In addition, the present invention relates to a scattered light detection module, which uses a Bessel beam to form an annular beam, and detects scattered light reflected or transmitted through the inspected object when the formed annular beam is used to inspect the inspected object, thereby improving contrast...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3581G01N21/49G02B27/09
CPCG02B27/0927G02B27/0955G01N21/47G02B3/00G02B2003/0093
Inventor 玉景植崔成旭张玄珠
Owner KOREA FOOD RES INST
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