119 results about "Bessel beam" patented technology

The invention relates to the technical field of laser micromachining, in particular to a TGV drilling machining system and method based on a space-time modulation Bessel beam, an initial laser beam is output through a laser device, the initial laser beam is modulated into a dynamic pulse sequence through a pulse chirp regulation and control module, axial energy attenuation is compensated, a machining subsystem generates the Bessel beam, and the TGV drilling machining system and method based on the space-time modulation Bessel beam are obtained. The angle is finely adjusted in real time through piezoelectric driving, and a dynamic spatial light modulator loads an exponential decay type phase mask, so that light beam airspace shaping, non-diffraction light beam generation, pulse time sequence and phase parameter synchronous control and high-peak power pulse array are realized, and finally, integrated micro-perforation and channel modification of the glass substrate are realized; and the machining efficiency and precision are obviously improved.

The invention belongs to the technical field of radiation effect and radiation hardening of semiconductor devices and integrated circuits, and particularly relates to a single event effect laser simulation system based on Bessel beam shaping. A Bessel beam shaping and focusing module based on an axon lens is introduced and composed of the axon lens and two lenses, namely a single lens and a focusing lens, a Gaussian beam of an incident beam is shaped into a quasi-Bessel beam, and the quasi-Bessel beam is utilized to irradiate a semiconductor device to be detected. The axial distribution of the light beam is kept unchanged in a range of hundreds of microns, and the focusing breaking through the diffraction limit is realized in the radial distribution, so that the effect closer to the heavy ion charge deposition track is generated. The technology can solve the problem that a multilayer structure device, a thick sensitive region device and a wide forbidden band device are difficult to test through traditional laser simulation, and has important practical value for promoting laser simulation of the single event effect.

The invention discloses a non-diffraction laser communication terminal based on Bessel beams. The terminal comprises a beacon transmitting module, an optical antenna module, a beacon receiving module, a signal transmitting module, a signal receiving module and a light splitting module. The beacon transmitting module and the signal transmitting module respectively convert the Gaussian beam into a Bessel beam through an axicon, and the Bessel beam is output through a collimating lens; a primary mirror and a secondary mirror of the optical antenna module are mounted in an off-axis manner, so that light beams are shrunk and expanded; the light splitting module completes light path switching and light splitting through a fast reflecting mirror, a 1 / 4 wave plate, a dichroscope and a polarizing beam splitter; the beacon receiving module obtains beacon light position information through a CMOS detector, and the signal receiving module receives signal light through an APD detector. The non-diffraction characteristic of the Bessel beam is utilized, and the off-axis optical antenna and the polarization beam splitting design are combined, so that high-precision and low-loss laser communication is realized.

The invention discloses a gallium oxide substrate surface grinding morphology prediction method and system, and relates to the technical field of nondestructive testing, and the method comprises the steps: collecting a surface fluorescence distribution image, matching the surface fluorescence distribution image with a pre-constructed fluorescence-crack mapping database, and generating a two-dimensional crack depth distribution cloud picture; marking a risk area coordinate set in the two-dimensional crack depth distribution cloud picture based on a preset crack depth threshold value; inputting the risk area coordinate set into a Bessel beam chromatography scanner for multi-angle transmission type scanning, synchronously collecting scattering images generated by scanning, and fusing the scattering images to generate a subsurface damage three-dimensional model; and performing data registration and weight superposition on the two-dimensional crack depth distribution cloud picture and the subsurface damage three-dimensional model, and outputting a morphology prediction report and grinding process optimization parameters. The subsurface damage three-dimensional model is constructed through the Bessel beam tomography scanning and multi-angle scattering image fusion technology, and high-resolution visual reconstruction of microcracks and damage distribution in the gallium oxide substrate is achieved.

Disclosed in the present invention is a method for forming a precise through-hole at high speed by using an infrared laser, wherein the method irradiates in turn single modulated Bessel beam onto a workpiece in a scanning fashion by means of a mirror structure with at least one driving unit coupled to form a laser scanning processing pattern that changes the characteristics of the workpiece by precisely micromachining the workpiece into various shapes or sizes at high speed, and then wet-etching the workpiece, such that the method not only enables laser-machining the workpiece at high speed by significantly reducing laser-machining time compared to conventional methods, but also improves productivity by reducing etching time.

The modified Bessel beam generating device that achieves design flexibility is provided. The present invention provides a Bessel beam generating device that splits a laser beam emitted from a single light source and causes diverging light in a donut shape from optical fibers arranged on the same circle to be emitted toward the inside, thereby emitting a disk illumination beam that is focused in the vicinity of the center. This makes it possible to generate a disk illumination beam without blocking the high-intensity central portion and without reducing the light intensity.

This invention relates to the field of semiconductor lasers, and more particularly to a multi-chip ring array vertical cavity surface-emitting laser (VCSEL), comprising: a gain chip array, a beam-splitting axial conical lens group, a beam-combining axial conical lens group, and an output coupling mirror arranged coaxially. The gain chip array includes N (N>1) VECSEL gain chips arranged in M ​​concentric rings (M>1). The beam-splitting axial conical lens group includes M beam-splitting axial conical lenses. The beam-combining axial conical lens group includes M beam-combining axial conical lenses. The N laser beams first pass through the beam-splitting axial conical lens group to generate M-order Bessel beams, and then pass through the beam-combining axial conical lens group to combine into a resonant beam. This resonant beam resonates within the coaxial resonant cavity formed by the output coupling mirror and the gain chip array, resulting in the output laser beam. This invention employs a modular cascaded structure of axial conical lenses, realizing the parallel superposition of multiple rings of chips, fully utilizing the radial spatial dimension, and improving chip integration density.

The application discloses a three-piece Bessel beam shaping system with a diffraction ring, and belongs to the technical field of laser processing, comprising: a beam shaping mirror, a first collimating mirror and a focusing mirror; the incident surface and the exit surface of the beam shaping mirror are annular planes and annular aspheric surfaces respectively, and are used for shaping a collimated Gaussian beam into a point annular beam with energy gradually decreasing from inside to outside; the incident surface and the exit surface of the first collimating mirror are annular aspheric surfaces and annular planes respectively, and are used for collimating the point annular beam; the incident surface of the focusing mirror is a combination of an axicon surface and a spherical surface, and the exit surface is a plane; the focusing mirror is used for focusing the collimated point annular beam into a Bessel beam with a diffraction ring. The application can significantly improve the focal depth of the Bessel beam in laser processing, and can also effectively remove processing materials such as ink. In addition, the focal depth of the Bessel beam in the application is adjustable, and the adjustment mode is more, the flexibility is higher, and is suitable for different laser processing scenes.

The application relates to a large-diameter high-power pseudo-Bessel beam generation method and a generation device, and belongs to the technical field of communication. The method comprises the following steps: S100, an electromagnetic beam output by a feed horn is propagated to a first reflecting surface, and a target pseudo-Bessel beam is reversely propagated to a second reflecting surface; S200, the electromagnetic beam is propagated to the second reflecting surface through the first reflecting surface, a phase difference on the second reflecting surface is obtained, and a deformation variable of the second reflecting surface is updated; S300, the target pseudo-Bessel beam is propagated to the first reflecting surface through the second reflecting surface, a phase difference on the first reflecting surface is obtained, and a deformation variable of the first reflecting surface is updated; and S400, steps S100 to S300 are repeated until the relative field distribution of the output electromagnetic beam and the target pseudo-Bessel beam reaches a stable state, and a large-diameter high-power pseudo-Bessel beam is obtained. The application can solve the technical problems of existing media loss and limited power capacity.

This application relates to the field of electromagnetic waves, specifically providing a polarization state detection method and apparatus. The method utilizes a polarization state detection device for detection and includes: inputting the beam to be detected into the polarization state detection device to obtain orthogonal first and second Bessel beams; using a polarizer to obtain the azimuth angles corresponding to the interference weakening or enhancement regions in the interference patterns of the first and second Bessel beams, and determining the phase difference between the first and second Bessel beams based on the azimuth angles; using the polarizer to obtain the first amplitude of the first Bessel beam and the second amplitude of the second Bessel beam, respectively, and obtaining the amplitude ratio based on the first and second amplitudes; and calculating the polarization state of the wave to be detected based on the phase difference and amplitude ratio. This polarization state detection method simplifies the polarization state detection process for terahertz and millimeter waves, promoting the miniaturization and integration of detection equipment.

The application discloses a method for generating an ultralong focal depth array beam, and belongs to the technical field of grating manufacturing. The method comprises the following steps: constructing a Bessel beam excitation phase and a circular Airy beam excitation phase, constructing a composite phase distribution according to the array Bessel beam excitation phase and the array circular Airy beam excitation phase, and encoding the composite phase distribution to a metasurface; irradiating the metasurface with a linear polarization state plane wave, so that a left-handed circular polarization component excites an array Bessel beam, and a right-handed circular polarization component excites an array circular Airy beam; the array circular Airy beam is converted into a Bessel propagation mode after self-focusing, is spliced with the array Bessel beam in an axial direction to form a continuous light field distribution, and an ultralong focal depth array beam is obtained. The method can be applied to the fields of parallel laser processing, three-dimensional microscopic imaging and microparticle manipulation, and can extend the focal depth of the array Bessel beam while keeping the transverse resolution close to the diffraction limit.

The invention provides a method for realizing ultra-high-speed translation of a Bessel beam by using double acousto-optic modulation elements, which is characterized in that the displacement in the x-axis direction and the displacement in the y-axis direction are changed at a high speed by quickly switching radio frequencies f1 and f2, so that ultra-high-speed punching on the surface of a workpiece is realized; meanwhile, each hole has excellent morphology consistency due to vertical incidence, so that the problem of hole shape distortion caused by inclined incidence at the scanning edge of a traditional galvanometer is avoided; that is to say, the all-solid-state diffractive optical element is adopted, no mechanical moving part exists, the limitation of mechanical inertia is completely eliminated, the response time of light beam displacement only depends on the change speed of a driving signal and the establishment time of the diffraction effect, the MHz-level control effect can be easily achieved, and the speed is several orders of magnitude faster than that of a traditional galvanometer. The method is especially suitable for application scenes such as laser processing, optical tweezers, confocal microscopic imaging and high-speed optical switches.

The invention relates to the technical field of filter membrane processing, and discloses a preparation method and a preparation system for preparing a through-hole filter membrane by using reflective Bessel laser. The preparation system for preparing the through hole filter membrane by using the reflection type Bessel laser comprises a light beam shaping assembly and a transmission assembly, the beam shaping assembly is used for reflecting and converting the incident laser into a Bessel beam; the transmission assembly is arranged on a light path of the Bessel beam and used for transmitting a non-diffraction area of the Bessel beam to a machining station. By arranging the beam shaping assembly, the incident laser can be reflected and converted into the Bessel beam instead of being transmitted to form the Bessel beam. The reflective design can avoid energy absorption of a transmission element, and is suitable for long-time high-power processing; the reflection type design does not need to consider the transmissivity of the material, and can support the incident laser from the ultraviolet band to the infrared band; the reflective design has no thermal lens effect, and the focal depth stability of a Bessel beam diffraction-free area is high.

Method and system for breaking an internal shape in a sheet of glass in the flat state. The invention relates to a method for breaking an internal shape (10_INT) in a sheet of glass (10) in the flat state, said method comprising the steps of: - making (E10) a cutting line (T_D) in the sheet of glass using a Bessel beam pulsed laser or laser filamentation, said cutting line delimiting the internal shape with respect to a peripheral shape (10_EXT) complementary to the internal shape, - generating (E20) a temperature gradient between the internal shape and the peripheral shape to break said internal shape. Figure for the abstract: Fig. 2

The invention discloses a laser double-beam interference micropore machining phase modulation method which comprises the following steps: respectively emitting two Gaussian beams, and respectively modulating and compounding phases to obtain vortex Bessel beams; respectively adjusting the pulse sequences of the two Gaussian beams into a pre-pulse and a main pulse which are connected into a whole and have different energy; respectively carrying out polarization treatment on the two Gaussian beams to obtain two energy brushes which reversely rotate around the outer surface of the circumference of the vortex Bessel beam to clean chips; s2, monitoring the difference between the micropore depth and the target hole depth in real time, and continuously adding additional phase offset to the composite phase in S1; the long focal depth characteristic of the Bessel beam and the annular energy distribution of the vortex beam are combined, the focal depth range is expanded, meanwhile, laser energy is dispersed to the circumferential area from the center point, the peak power density is reduced, the heat dissipation condition is improved, the problem of insufficient focal depth is effectively solved, and feature offset caused by heat accumulation is synchronously restrained.

The application discloses an optical element subsurface defect detection method and system based on phase contrast digital holography, and belongs to the field of precision measurement technology; the system adopts annular Bessel beam Kohler illumination, utilizes polarization modulation technology and a specially-made polarization contrast ring to realize synchronous four-step phase shift high-speed quantitative phase measurement in a U-shaped light path; the method acquires complex amplitude through a polarization camera, compensates for resolution loss by using a self-supervision super-resolution reconstruction algorithm fused with a physical model; full-field and local inverse diffraction reconstruction is carried out based on angular spectrum diffraction theory, high-precision depth positioning is realized based on the diffraction light complex amplitude distribution characteristics as a focusing criterion; three-dimensional information representation of defects is realized in combination with an optical field scattering and diffraction model and a machine learning algorithm; the application can realize high-sensitivity, high-signal-to-noise ratio, real-time in-situ quantitative detection and three-dimensional reconstruction of submicron defects without significantly increasing the cost.

The invention provides an optical system and laser processing equipment, and the optical system is used for modulating laser and comprises a first optical element and a second optical element which are sequentially arranged in the laser propagation direction; the first optical element is provided with a first surface which allows laser to enter and is vertical to the laser, and a conical second surface of which the axis coincides with the axis of the laser, so as to obtain an annular light beam; the second optical element comprises a correction unit used for correcting aberration of the annular light beam and a focusing unit used for focusing the annular light beam. The laser is modulated through the arranged optical element, the long-focal-depth Bessel beam is obtained, and the quality of glass through hole modification is better.

The invention relates to the technical field of biological fluorescence microscopic imaging, and particularly discloses a Bessel two-photon light sheet microscope illumination beam expansion method and system, and the method comprises the steps: providing a beam of near-infrared femtosecond laser, and modulating the near-infrared femtosecond laser into a Bessel beam; a piezoelectric ceramic displacement device is used for driving an illumination objective lens, so that the illumination objective lens moves in the direction of an illumination optical axis and stays at a plurality of preset positions in sequence; when the piezoelectric ceramic shifter moves to a preset position, increasing the power of the Bessel beam to two-photon excitation power through an electro-optical modulator, and maintaining for time T; in the process that the piezoelectric ceramic shifter moves from one preset position to the next preset position, the power of the Bessel beam is reduced to the level where two-photon fluorescence cannot be excited through an electro-optical modulator; a plurality of relatively short and thin Bessel illumination beams are spliced together to form a long and thin Bessel illumination beam, thereby expanding the high resolution illumination field of view.

The invention provides a method and device for repairing a TGV substrate, and the method comprises the steps: determining the position of a metal column with a structural defect on a glass substrate, obtaining the position information of the defect, and enabling the metal column to penetrate through the glass substrate in the vertical direction; and according to the defect position information, a Bessel beam is adopted to irradiate the metal column with the structure defect from bottom to top, so that the part, irradiated by the Bessel beam, in the metal column with the structure defect is heated to be molten and recast, and the metal column with the structure defect is repaired. According to the invention, the yield of the TGV substrate can be improved.

The invention discloses a wavefront regulation and control method based on a dielectric metasurface, which belongs to the technical field of wavefront regulation and control, and comprises the following steps of: resolving a Helmholtz equation, obtaining a self-acceleration Bessel beam, solving a first-order derivative of the self-acceleration Bessel beam, obtaining a generalized Bessel type self-acceleration beam, and carrying out wavefront regulation and control on the basis of complex amplitude distribution of the generalized Bessel type self-acceleration beam. And a pure-phase computer-generated hologram is calculated by using complex amplitude coding. According to the electrolyte metasurface, materials with high modulation efficiency can be found in a wide wave band range, and large-scale mass production is expected to be achieved with low cost due to the common silicon-based materials and the common titanium dioxide-based materials; the metasurface is utilized to realize joint regulation and control of multiple parameters of the light beam, so that functional diversification is realized, and the application range is widened.

The application discloses an optical fiber device, a preparation method of the optical fiber device and a coupling device, and belongs to the technical field of micro-nano photonics. The application sequentially arranges a mode field expansion area and a phase modulation area at an exit end of an optical fiber, uses the mode field expansion area to expand a beam mode field diameter, uses a substrate film matched with the mode field expansion area in refractive index and a micro-nano unit with high refractive index to form the phase modulation area, realizes a target phase distribution based on geometric sizes and / or a rotation angle of the micro-nano unit, and then performs phase modulation and wavefront shaping on the expanded beam, so as to output a target light field such as a focused beam, a collimated beam, a Bessel beam or a Bessel beam array. The optical fiber device can realize high coupling efficiency, high alignment tolerance and multi-functional wavefront regulation at the exit end of the optical fiber, can solve the mode field mismatch problem in optical fiber-chip coupling, can reduce system complexity and realize multi-functional integration.

This invention belongs to the field of laser processing, specifically relating to a method for preparing concentric ring micropores using a femtosecond Bessel beam for polymer thin films. The method includes: guiding a Bessel beam, consisting of a central core and multiple concentric rings surrounding it, onto the surface of a polymer thin film deposited on a transparent substrate; adjusting the single-pulse energy to selectively activate the central core of the Bessel beam, or a combination including the central core and one or more peripheral concentric rings, such that the energy density of the activated region exceeds the ablation threshold of the polymer thin film, thereby forming a micropore in the polymer thin film under the action of a single pulse; wherein the pore size of the micropore is determined by the activated central core or the combination thereof, and the micropore is a low aspect ratio hole with a depth substantially equal to the thickness of the polymer thin film, without damaging the transparent substrate. By controlling the activation of the concentric rings of the Bessel beam, the pore size and shape characteristics can be regulated.

The invention relates to a method for treating a glass sheet (1) in order to obtain at least one barrier (20) for protecting a defined region of the sheet (1), referred to as the protected region (ZP), against propagation of glass fragmentation or cracking, the method comprising a treatment step consisting in producing at least one demarcation line (22) which, constituting the at least one barrier (20) for protecting the protected region (ZP), comprises a multiplicity of points (PI), each of which corresponds to a microchannel (30) obtained by a local modification of the material by means of a laser device generating a Bessel beam (F) or by laser filamentation and extending in a straight line through at least 80%, preferably 100%, of the thickness (e) of the glass sheet (1), orthogonal to the surfaces of the glass sheet (1). The present invention also relates to a laminated glazing unit (10), such as a side window or a windshield, comprising such a barrier (20) for protection against glass fragmentation or cracking.

The application discloses an elliptical Bessel cutting head device, a direct drive motor is connected with a two-dimensional translation table through an adapter, the two-dimensional translation table is fixed with the cutting head through an adapter block, and the cutting head can be driven to rotate and move in two dimensions; the cutting head comprises a diffraction type conical lens and a focusing mirror arranged along an optical path, and the diffraction type conical lens and the focusing mirror are used for shaping a Gaussian distributed laser beam into an elliptical Bessel distributed light beam; the surface of the diffraction type conical lens element is provided with a microstructure, and the microstructure is in the form of an annular grating structure; the elliptical Bessel light beam is shaped by using the diffraction type conical lens with an elliptical distribution and the focusing mirror, and the Gaussian distributed ultrashort pulse laser is shaped into the elliptical Bessel light beam, and cracks along the direction of the long axis of the ellipse are guided out on sapphire and glass; the cutting head is rotated along a pattern tangent angle, and machining of an arbitrary pattern is realized, and oblique cracks generated in ordinary Bessel beam machining are avoided. The laser transmission efficiency is improved, and the structure is very compact.

The invention relates to a focus depth controllable Gaussian-Bessel beam generation method, a focus depth controllable Gaussian-Bessel beam generation device and a storage medium, and belongs to the technical field of laser processing. In the optimization process, a standard axicon phase corresponding to a target non-diffraction propagation length is introduced as a fixed initial value, the problems of slow convergence and uncontrollable focal depth caused by a random or zero initial value in a traditional method are avoided, rapid, flexible and controllable focal depth is realized, and by obtaining the actually measured light intensity along the optical axis direction, the target non-diffraction propagation length is optimized. Compared with numerical simulation light intensity point by point, a difference field matrix is constructed and fed back to an optimization process to iteratively update a phase function, so that not only is the uniformity of axial intensity improved, but also attenuation caused by tail energy collapse and environmental noise under a long focal depth condition is effectively inhibited, and the method has high robustness and practicability. The technology is suitable for scenes with extremely high requirements on uniformity and focal depth, such as laser precision processing, long focal depth microscopic imaging, optical communication and the like.

The invention discloses a femtosecond laser processing method for rapidly preparing a low-loss spiral cladding waveguide, and belongs to the technical field of femtosecond laser precision processing. The method specifically comprises the following steps: (1) leveling a transparent optical crystal; (2) a femtosecond laser Bessel beam vertically enters the transparent optical crystal and is focused on the contact surface of the sample and the six-dimensional electric platform, and a femtosecond laser modified nick with a reduced refractive index is generated; (3) a spiral curve machining program is operated to control the six-dimensional electric platform to move downwards along the incidence direction of the femtosecond laser along the track of a spiral line, and a spiral cladding waveguide is generated; and (4) optical polishing treatment. According to the femtosecond laser processing method, the spiral cladding waveguide structure can be simply and rapidly prepared in the transparent optical crystal, the side wall of the prepared cladding waveguide is smooth, and low-loss transmission of laser can be achieved.

A cavity forming method includes the steps of: providing the material modification processing device; according to the cavity topography of the workpiece, utilizing the material modification processing device to perform local modification including: calculating the laser-light shaping and scanning information, and based on the laser-light shaping and scanning information to have the optical axis adjustment unit to adjust positions of the laser-light shaping and scanning processing module and the processing stage, such that the area of the workpiece to be projected by the Bessel beam can be formed as the modified area; and, etching the modified area to form a cavity of the cavity topography. In additional, a material modification processing device is also provided.

The invention provides a scanning probe microscope, comprising: a light beam conversion lens group configured to convert a light beam emitted by a light source into a Bessel light beam; a probe arm of the probe at least partially reflects the Bessel beam, and the light reflecting position of the probe arm is located in the focal depth range of the Bessel beam; and the position sensitive detector is configured to be capable of forming a corresponding signal form according to the position of the received light beam reflected by the probe arm. The probe is located in the focal depth range of the Bessel beam, so that the light path adjustment difficulty is reduced, and the environmental requirements of the scanning probe microscope are reduced. The invention also provides a sample detection method using the scanning probe microscope.

The energy distribution regulation method of the quasi-Bessel beam based on the vortex feed source comprises the following steps: step 1, setting the beam parameters of the quasi-Bessel beam generated by the electromagnetic super surface, for calculating the array scale of the electromagnetic super surface and designing the vortex feed source; step 2, designing the parameters of the vortex feed source, obtaining the vortex feed source; step 3, calculating the array scale of the electromagnetic super surface, for the design of the electromagnetic super surface; step 4, according to the phase compensation design of the set beam parameters of the quasi-Bessel beam and the parameters of the vortex feed source, constructing the super surface; step 5, exciting the vortex feed source with radio frequency, realizing the feed of the vortex wave to the electromagnetic super surface, and generating the quasi-Bessel beam with controllable energy distribution. The application controls the electric field intensity distribution of the vortex wave generated by the vortex feed source, and uses the electromagnetic super surface to compensate the phase of the generated vortex electromagnetic wave, so that the energy distribution regulation of the quasi-Bessel beam is realized.

The invention discloses a Bessel beam focusing position adjustable method and device, and relates to the technical field of optics, and the Bessel beam focusing position adjustable method comprises the steps: obtaining the radius of an adjusting circular ring on an amplitude filter; acquiring the focal length of the focusing lens; obtaining an angle difference between the first diffractive optical element and the second diffractive optical element; adjusting a defocus value of the optical system according to the angle difference; according to the technical scheme of the invention, only the first diffractive optical element and the second diffractive optical element are adjusted, so that rapid, high-precision, continuous and dynamic adjustment of the optical system on the focusing position of the Bessel beam is realized. And the focal depth of the Bessel beam is not changed in the adjustment process, so that the longitudinal relative spatial distribution of the beam before and after adjustment is not influenced.