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Vacuum sensor and vacuum gauge

A vacuum sensor and support technology, which is applied in vacuum gauges, instruments, measuring devices, etc., can solve the problems of limited application of Pirani vacuum sensors, small range, and inability to measure higher air pressure and vacuum.

Pending Publication Date: 2021-10-26
苏州容启传感器科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the existing Pirani vacuum sensor has a small measurement range and cannot be used to measure the vacuum at a higher pressure, which limits the application of the Pirani vacuum sensor.

Method used

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  • Vacuum sensor and vacuum gauge
  • Vacuum sensor and vacuum gauge
  • Vacuum sensor and vacuum gauge

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Embodiment Construction

[0025] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present disclosure.

[0026] Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The figures are not drawn to scale, with certain details exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions / layers with different shapes, s...

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Abstract

The invention discloses a vacuum sensor and a vacuum gauge, relates to the technical field of vacuum pressure measurement, and is used for expanding the vacuum degree measuring range of the vacuum sensor, so that the vacuum sensor can be used for measuring the vacuum degree under higher air pressure, and the application range of the vacuum sensor under the higher air pressure is expanded. The vacuum sensor comprises a substrate and a suspension structure. The base is provided with a groove. And the suspension structure is arranged above the groove. The suspension structure comprises a suspension heat plate and at least two cantilever beams. The suspended hot plate is connected with the substrate through at least two cantilever beams. Each cantilever beam is provided with a supporting part and a heating part arranged on the supporting part. The thermal expansion coefficient of the material of the heating part is different from the thermal expansion coefficient of the material of the supporting part. And the heating part is used for heating the corresponding cantilever beam when the vacuum sensor is in a working state so as to shorten the heat exchange distance of the vacuum sensor. The vacuum sensor is applied to the vacuum gauge.

Description

technical field [0001] The invention relates to the technical field of vacuum pressure measurement, in particular to a vacuum sensor and a vacuum gauge. Background technique [0002] The Pirani vacuum sensor is one of the heat conduction vacuum sensors. Its working principle is: the heat conducted by the heating object included in the Pirani sensor is changed with the air pressure by the surrounding gas. Based on this, the relationship between the electrical response and the degree of vacuum is established through the principle of thermoelectric coupling, so as to realize the pressure monitoring of the vacuum environment. The Pirani vacuum sensor has the advantages of small size, low cost, low energy consumption, and fast response, and is widely used in various sizes of vacuum packages and vacuum monitoring of micro-cavities. [0003] However, the existing Pirani vacuum sensor has a small measurement range and cannot be used to measure the vacuum degree at a higher pressur...

Claims

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Application Information

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IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 王媛孙宏霖
Owner 苏州容启传感器科技有限公司
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