Workpiece position adjusting method, control processing device and adjusting system

Abstract

The invention provides a workpiece position adjusting method, a control processing device and an adjusting system.The adjusting method comprises the steps that feature information of a to-be-detected workpiece is obtained, and a reference moving track of the to-be-detected workpiece is determined based on the feature information of the to-be-detected workpiece; in the moving process of the to-be-detected workpiece, multiple moving images of the to-be-detected workpiece are obtained, the actual moving track of the to-be-detected workpiece is determined based on the multiple moving images, and the multiple moving images are actively obtained by following the movement of the to-be-detected workpiece; and if the actual movement track is not consistent with the reference movement track, the position of the to-be-detected workpiece is adjusted based on the reference movement track. The error between the dynamic track and the actual track of the to-be-detected workpiece is accurately compared in real time, parameters for compensating the motion track are provided, and the function of automatic calibration is achieved.

Description

Technical field [0001] The present application relates to the field of automated technology, and more particularly to a modification method, a control processing apparatus, and an adjustment system for a workpiece position. Background technique [0002] Computer vision is an industrial, inspection, document analysis, medical diagnosis, and military and other fields in various intelligent / autonomous systems in various intelligent / autonomous systems. It is a door to how to use camera / cameras and computers. The data and information of the subjects we need are subject to the subject. The image is that it is used to install the eye (camera / camera) and the brain (algorithm) for identifying, tracking and measurement of the target, so that the computer can perceive the environment. Because the perception can be seen as extracting information from the senses signal, computer vision can also be seen as a science of how to "perceive" in image or multi-dimensional data. In general, c...

AI Technical Summary

Problems solved by technology

[0003] After research, it is found that in the current fully automatic semiconductor processing equipment, because some workpieces have special requirements for automation during the processing process, it is necessary to perform feature recognition on the workpiece during the movement of these workpieces. The specific implementation method is as follows: The workpiece is controlled to move according to the reference movement trajectory, and the detection equipment is set at the fixed position of the reference movement trajectory to identify and detect the workpiece. However, since the movement trajectory of the workpiece is uncontrollable in actual detection, the detection equipment at the fixed position cannot be real-time. Accurately obtain the position information of the workpiece, resulting in low accuracy in detecting the position information of the workpiece

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