A Characterization Method for Unrestricted Image Square Field Distribution
An unlimited, square field technology, applied in the field of optical principles, can solve problems such as the calculation of energy distribution in space that is difficult to meet, and achieve the effect of a wide range of applications
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[0031] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0032] The invention provides an unrestricted image-side dispersion distribution characterization method, that is, a method for accurately calculating the light intensity distribution at any defocus plane of any aperture diaphragm. figure 2 The structure of an optical system including an aperture stop 1 and a lens is shown. The lens is selected within the allowable error range and the lens with small aberration, such as microscope objective lens, lithography objective lens, etc. The Fourier lens 2 with accurate calculation results is preferred. The light passes through the aper...
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