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A Characterization Method for Unrestricted Image Square Field Distribution

An unlimited, square field technology, applied in the field of optical principles, can solve problems such as the calculation of energy distribution in space that is difficult to meet, and achieve the effect of a wide range of applications

Active Publication Date: 2022-07-26
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, the traditional Fresnel diffraction theory is only applicable to axisymmetric aperture diaphragm imaging optical systems, such as circular apertures, rectangular apertures, etc., and can only calculate the energy distribution at the focal plane, which is difficult to meet the requirements of the current scientific and technological development for universal imaging. Calculation of energy distribution in square space, such as autofocus system, super resolution system, depth of field expansion system, etc.

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  • A Characterization Method for Unrestricted Image Square Field Distribution
  • A Characterization Method for Unrestricted Image Square Field Distribution
  • A Characterization Method for Unrestricted Image Square Field Distribution

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Embodiment Construction

[0031] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

[0032] The invention provides an unrestricted image-side dispersion distribution characterization method, that is, a method for accurately calculating the light intensity distribution at any defocus plane of any aperture diaphragm. figure 2 The structure of an optical system including an aperture stop 1 and a lens is shown. The lens is selected within the allowable error range and the lens with small aberration, such as microscope objective lens, lithography objective lens, etc. The Fourier lens 2 with accurate calculation results is preferred. The light passes through the aper...

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Abstract

The invention provides a method for characterizing the field distribution of the unrestricted image field, which is used to calculate the light intensity distribution of an optical system including an aperture diaphragm and a Fourier lens. The plane and the defocus surface, the calculation method includes the following steps: calculating the complex amplitude transmittance of the plane field distribution of the aperture stop surface; calculating the defocus factor at the defocus plane to be measured; calculating the complex amplitude transmittance and defocus in the frequency domain The Fourier transform of the factor; calculates the light intensity distribution at the out-of-focus plane to be measured. Under the conditions of a given system focal length and working wavelength, the light intensity distribution of the aperture diaphragm with any shape and any off-axis quantity on any defocused surface can be obtained by using the image-side dispersion distribution characterization method adopted in the present invention, In this way, the intensity variation of any aperture diaphragm under any defocus plane can be analyzed.

Description

technical field [0001] The invention relates to the field of optical principles, in particular to a method for characterizing the field distribution of an unrestricted image square. Background technique [0002] Accurate calculation of the spatial light intensity distribution in the image space is of great significance for optical design. Usually, the aperture diaphragm imaging follows the Fresnel diffraction theory. The traditional Fresnel diffraction theory is only applicable to axisymmetric aperture diaphragm imaging optical systems, such as circular aperture, rectangular aperture, etc., and can only calculate the energy distribution at the focal plane, which is difficult to meet the current scientific and technological development for universal imaging. Calculation of energy distribution in square space, such as autofocus system, super-resolution system, depth of field expansion system, etc. SUMMARY OF THE INVENTION [0003] In order to solve the above problems, the p...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00
CPCG02B27/0012
Inventor 陈涛金思宇余毅刘英陈小林王成龙张晓宁
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI