Pressure sensor calibration method and device and electronic equipment

Abstract

The invention provides a pressure sensor calibration method and device and electronic equipment, and the method comprises the steps: obtaining the to-be-calibrated pressure data of a target pressure sensor at the current temperature if a data obtaining instruction of the pressure sensor is received; preprocessing the to-be-calibrated pressure data to obtain a real-time normal-temperature pressure coefficient of the target pressure sensor for pressure calibration; inputting the real-time normal-temperature pressure coefficient into a preset pressure sensor calibration model, and determining a simulated high-temperature pressure coefficient and a simulated low-temperature pressure coefficient corresponding to the real-time normal-temperature pressure coefficient; and determining calibrated pressure data of the target pressure sensor according to the real-time normal-temperature pressure coefficient, the simulated high-temperature pressure coefficient and the simulated low-temperature pressure coefficient. According to the method, pressure calibration is realized through the full-temperature-zone pressure adjustment coefficient, so that the calibration precision of the pressure sensor is improved.

Description

technical field [0001] The invention relates to the technical field of sensor calibration, in particular to a pressure sensor calibration method, device and electronic equipment. Background technique [0002] Due to the temperature drift characteristics of the sensor, the existing common calibration methods include single temperature calibration and multi-temperature calibration. Among them, the single-temperature calibration method is easy to implement because there is no temperature change, but the accuracy of the entire temperature range is low. Because there is no compensation coefficient for temperature, the final output accuracy of the pressure sensor depends entirely on MEMS (full name MicroElectromechanical System, that is, Micro Electromechanical System). The temperature characteristics of the electromechanical system), while the currently commonly used piezoresistive MEMS characteristics have a large drift with temperature, and finally the single-temperature calibr...

AI Technical Summary

Problems solved by technology

Among them, the single-temperature calibration method is easy to implement because there is no temperature change, but the accuracy of the entire temperature range is low. Because there is no compensation coefficient for temperature, the final output accuracy of the pressure sensor depends entirely on MEMS (full name MicroElectromechanical System, that is, Micro Electromechanical System). The temperature characteristics of the electromechanical system), while the commonly used piezoresistive MEMS characteristics drift greatly with temperature, and finally the single-temperature calibration accuracy is low in the production stage

Furthermore, multi-temperature calibration has temperature changes. Although the calibration accuracy in the entire temperature zone is high, the calibration process is difficult, mainly due to the difficulty of temperature control during the calibration process, and the calibration also has very high requirements for the stability of the temperature control equipment. As a result, not only the calibration accuracy cannot be ensured, but also the production cost is high

[0003] Overall, the existing calibration methods for pressure sensors still have low calibration accuracy.

Images