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Wafer storage device and automatic material taking and placing equipment with same

A wafer storage, automatic pick and place technology, used in conveyor control devices, packaging, transportation and packaging, etc., can solve problems such as slow product efficiency and personnel damage, improve efficiency, simplify the loading and unloading process, and meet the needs of multiple materials. The effect of box storage

Inactive Publication Date: 2022-04-01
厦门特仪科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Manually picking and placing products in a high-temperature environment is slow and can easily cause personal injury

Method used

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  • Wafer storage device and automatic material taking and placing equipment with same
  • Wafer storage device and automatic material taking and placing equipment with same
  • Wafer storage device and automatic material taking and placing equipment with same

Examples

Experimental program
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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings.

[0030] see Figure 1 to Figure 6 , the present invention provides a wafer storage device 3, including a rack 306, a cooling table 301 for unloading wafers, a transfer table 303 for loading wafers, a three-axis wafer retrieving module 304, and a wafer jam 305; A wafer temporary storage station, a wafer storage station and a wafer heat dissipation station are set in the storage rack 306, and the wafer temporary storage station is installed with the loading wafer transfer station 303, and the wafer storage station The wafer jamming station 305 is installed at the workstation, the wafer unloading wafer cooling table 301 is installed at the wafer cooling station, and the wafer three-axis retrieving module 304 is installed on the rack 306 .

[0031] see Figure 1 to Figure 3 , Figure 5 , in an embodiment of the present invention, ion fans 307 are installed on both sides ...

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Abstract

The invention relates to a wafer storage device and automatic material taking and placing equipment with the same. The wafer storage device provided by the invention comprises a storage rack, a blanking wafer heat dissipation table, a feeding wafer transfer table, a wafer three-axis material taking module and a wafer clamping plug, a wafer temporary storage station, a wafer storage station and a wafer heat dissipation station are arranged in the storage rack, the wafer temporary storage station is provided with the feeding wafer transfer table, the wafer storage station is provided with the wafer clamping plug, the wafer heat dissipation station is provided with the discharging wafer heat dissipation table, and the wafer three-axis material taking module is arranged on the storage rack. According to the equipment provided by the invention, the semiconductor wafer is automatically sucked and carried through the cooperation of the non-contact suction cup clamps of the wafer storage device and the wafer automatic loading and unloading device, the requirement of non-contact carrying of products is met, high-temperature operation can be carried out, manual operation is replaced, the number of workers is reduced, the production efficiency is greatly improved, and the operation is convenient.

Description

technical field [0001] The invention relates to the technical field of semiconductor wafer production, in particular to a wafer storage device and its automatic pick-and-place equipment. Background technique [0002] In the semiconductor wafer industry, due to the requirements of the production process, it is often necessary to perform chemical evaporation or physical deposition on a certain side of the wafer, which often requires that the surface cannot be touched; the evaporated product often has high temperature, and the front of the product cannot be touched , When the personnel take and place the product, they often need to carefully lift the product and suck the product from the back for product loading and unloading. Manually picking and placing products in a high-temperature environment is slow and can easily cause personal injury. The temperature of the evaporated wafer is very high, so after the wafer has completed the evaporation process, a temporary storage stat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G47/91B65G43/08B65D6/08B65D25/02
Inventor 吴泽斌王世锐林志阳
Owner 厦门特仪科技有限公司
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