Radio frequency ion source system and radio frequency ion source control method
A technology of a radio frequency ion source and a control method, which is applied in the field of ion source equipment, can solve the problems affecting the use effect of the radio frequency neutralizer, the control efficiency of the radio frequency neutralizer is low, and it is difficult to adjust parameters, etc., so as to reduce operational complexity and improve ionization. Neutralizing effect, solving the effect of wire length and wire requirements
Pending Publication Date: 2022-04-08
ZHONGSHAN IBD TECH CO LTD +1
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Problems solved by technology
[0004] In actual use, since the radio frequency neutralizer needs to be set by the operator every time it is started, the operation is more complicated, the efficiency is low, and it is difficult to adjust to the appropriate parameters. In addition, during the use process, when the radio frequency ion source emission parameters change , and corresponding setting operations are also required. The control efficiency of the RF neutralizer is low, which affects the use effect of the RF neutralizer
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[0069] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0070] The term "comprising" and any other variations in the embodiments of the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device comprising a series of steps is not limited to the listed steps or modules, but optionally also includes steps or modules that are not listed, or optionally also includes Other steps or modules inherent in a process, method, product, or apparatus.
[0071] refer to figure 1 , figure 1 It is a schematic diagram of a radio frequency ion source system of an embodiment; t...
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The invention relates to a radio frequency ion source system and a radio frequency ion source control method. The radio frequency ion source system comprises a radio frequency ion source and at least one radio frequency neutralizer matched with the radio frequency ion source, wherein a radio frequency controller of the radio frequency ion source is connected with a cathode controller of the radio frequency neutralizer through a communication line; the radio frequency controller is used for controlling the radio frequency ion source to start and maintain operation, and sending control parameters of the radio frequency ion source to the cathode controller; the cathode controller is used for controlling the radio frequency neutralizer to start and maintain operation according to the control parameters; according to the technical scheme, the radio frequency neutralizer can be started along with the radio frequency ion source and change along with the change of the load through the radio frequency controller and the cathode controller, independent setting, whole-process automatic starting and on-line control of the radio frequency ion source are not needed, the operation complexity of the starting and adjusting process is reduced, and the working efficiency is improved. And the control efficiency of the radio frequency neutralizer is improved.
Description
technical field [0001] The present application relates to the technical field of ion source equipment, in particular to a radio frequency ion source system and a radio frequency ion source control method. Background technique [0002] The radio frequency ion source is an ion source that generates plasma through radio frequency ionization, and then accelerates the positive ions to generate an ion beam through the electric field of the grid. The ion source needs a cathode or a neutralizer to provide electrons for neutralization during use; The neutralizer ionizes the gas through radio frequency, and then separates the electrons through the electric field, which can provide neutralizing electrons for the ion source, and has a stable use effect in practical applications. [0003] When the conventional radio frequency ion source and the radio frequency neutralizer are used together, after the radio frequency ion source is started, the radio frequency neutralizer is usually starte...
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Inventor 吴秋生刘伟基冀鸣赵刚易洪波
Owner ZHONGSHAN IBD TECH CO LTD