Two-degree-of-freedom testing device and method for TO component of quartz vibrating beam accelerometer

Abstract

A two-degree-of-freedom testing device for a TO component of a quartz vibrating beam accelerometer comprises a vacuum cavity which provides a vacuum environment and accommodates the TO component, and the TO component is installed in the vacuum cavity through a TO component fixing tool; the electric rotary table is mounted on the electric rotary table mounting bracket and is connected with the vacuum cavity through a vacuum cavity adapter plate; the multi-tooth indexing table is arranged on the multi-tooth indexing table mounting plate, and an electric rotary table mounting bracket for mounting an electric rotary table is arranged on the working surface of the multi-tooth indexing table; and the horizontal adjusting mechanism is provided with a horizontal adjusting mechanism limiting plate and is used for adjusting the levelness of the TO component mounting plate. According to the invention, two-degree-of-freedom rotation provided by the multi-tooth indexing table and the electric rotary table is utilized, so that the TO component can complete measurement of XYZ three-axis scale factors at one time and eliminate errors generated by multiple times of installation, and a vacuum environment required by normal work of a resonant beam chip of the TO component is provided by utilizing the vacuum cavity, so that a real and reliable test result is ensured.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical system (MEMS) inertial sensor testing, in particular to a two-degree-of-freedom testing device and method for a TO component of a quartz vibrating beam accelerometer. Background technique [0002] As we all know, the one-piece quartz vibrating beam accelerometer usually uses two differentially working resonant beam chips for measurement to reduce the influence of common-mode interference factors such as temperature fluctuations and cross-coupling. The effect of the differential depends on the two resonances. The consistency of the beam chip is more precisely the consistency of the TO component formed after the resonant beam chip and the TO (Transistor Outline package) base are pasted. In order to select the TO components that meet the requirements of XYZ three-axis scale factor matching, a multi-degree-of-freedom precision test device that can provide a vacuum environment is requir...

AI Technical Summary

Problems solved by technology

[0006] The first purpose of the present invention is to address the scale factor of traditional accelerometers in the prior art. The multi-tooth indexing table is usually used for four-point rollover testing. However, the multi-tooth indexing table has only one degree of freedom and cannot complete XYZ at one time. Scale factor measurement of three axes, and no defects such as vacuum test environment Provide a two-degree-of-freedom test device for the TO component of the quartz beam accelerometer

[0007] Another purpose of the present invention is to address the scale factor of the traditional accelerometer in the prior art, which usually uses a multi-tooth indexing table for four-point rollover testing, but the multi-tooth indexing table has only one degree of freedom and cannot complete XYZ at one time. Scale factor measurement of three axes, and no defects such as vacuum test environment Provide a two-degree-of-freedom test method for the TO component of the quartz beam accelerometer

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