Liquid material roller coating method

A liquid material and roller coating technology, which is applied to coatings, devices for coating liquid on the surface, semiconductor devices, etc., can solve the problems of uneven liquid flow on the liquid coating roller, uneven roller coating, and uneven thickness of the liquid material. To achieve the effect of uniform liquid and roller coating

Active Publication Date: 2022-06-24
CHANGZHOU SHICHUANG ENERGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The liquid material output from the liquid supply pipe will fall between the liquid-carrying roller and the liquid-coating roller. Since both ends of the liquid-carrying roller and the liquid-coating roller are open structures, the liquid material will flow from the two ends of the liquid-carrying roller and the liquid-coating roller. The end flow out, resulting in uneven thickness of the liquid material between the liquid-carrying roller and the liquid-coating roller, and the height of the liquid material in the middle of the liquid-coating roller and at both ends is inconsistent, so that the liquid-carrying roller is uneven, resulting in uneven roll coating, And then affect the performance of the final prepared crystalline silicon solar cells
[0003]In addition, the liquid coating roller is generally made of soft material, such as a sponge roller or rubber roller, so when rolling the liquid material on the surface of the silicon wafer, the coating liquid The pressure of the roller acting on the silicon wafer is small, and the pressure sensor cannot directly measure the pressure. As an important process parameter, the pressure has a great impact on the amount of roller coating. There is no good pressure detection method at present.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0012] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;

[0013] And a liquid blocking structure is arranged at both ends of the liquid coating roller; the liquid blocking structure includes: a pair of annular folds respectively arranged at both ends of the liquid coating roll; making the pair of annular folds and the liquid coating roll coaxial; The roller is located between the pair of annular folded edges, and the pair of annular folded...

Embodiment 2

[0017] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;

[0018] And a liquid-blocking structure is arranged at both ends of the liquid-carrying roller; the liquid-blocking structure includes: a pair of annular folds respectively arranged at both ends of the liquid-carrying roller; The roller is located between the pair of annular folds, and the pair of annular folds are respectively abutted against both end faces of the liquid coating rol...

Embodiment 3

[0022] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;

[0023] And a liquid-blocking structure is arranged at both ends of the liquid-coating roller and the liquid-carrying roller; the liquid-blocking structure includes: a pair of annular grooves respectively arranged at both ends of the outer peripheral surface of the liquid-applying roller, and two A pair of liquid blocking convex rings;

[0024] Make the pair of annular grooves coaxi...

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PUM

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Abstract

The invention discloses a liquid material roll coating method which comprises the following steps: roll coating a liquid material on a silicon wafer by adopting a liquid coating roller, and controlling the liquid thickness of the liquid coating roller by adopting a liquid carrying roller; liquid blocking structures are arranged at the two ends of the liquid coating roller and/or the liquid carrying roller, and liquid materials are prevented from flowing out of the two ends of the liquid coating roller and the two ends of the liquid carrying roller through the liquid blocking structures. According to the liquid material roller coating method, the liquid material can be prevented from flowing out from the two ends of the liquid coating roller and the liquid carrying roller, so that the liquid carrying roller carries the liquid more uniformly, and the roller coating is more uniform; the device can also be used for measuring the pressure of the liquid coating roller acting on the silicon wafer during roller coating.

Description

technical field [0001] The invention relates to the field of photovoltaics, in particular to a method for rolling liquid material of silicon wafers. Background technique [0002] In the production process of crystalline silicon solar cells, it is necessary to use a roller coating device to roll the liquid material on the surface of the silicon wafer. Existing roller coating devices generally include: a roller table for conveying silicon wafers, a liquid coating roller for rolling the silicon wafer on the roller table with liquid material, a liquid-carrying roller for transferring the liquid material to the liquid-coating roller, and a liquid-carrying roller and a coating roller for transferring the liquid material to the liquid coating roller. The liquid supply pipe for the liquid roller to transport the liquid material, and the lift drive mechanism that drives the liquid-staining roller and the liquid-coating roller to approach or away from the roller table. The silicon wa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C1/02B05C11/10H01L31/18
CPCB05C1/02B05C11/1005B05C11/10H01L31/18
Inventor 潘浩任常瑞符黎明
Owner CHANGZHOU SHICHUANG ENERGY CO LTD
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