Electronic-grade sulfur hexafluoride alkaline washing device and control method thereof

Abstract

The invention provides an electronic-grade sulfur hexafluoride alkaline washing device and a control method thereof. The electronic-grade sulfur hexafluoride alkaline washing device comprises a plurality of stages of alkaline washing towers which are connected in series; the primary alkaline washing tower is further connected with a circulating pipeline; the last stage of alkaline washing tower is further connected with an external circulating pipeline; a loop is formed between the circulating pipelines, and the loop is further provided with a first regeneration stirring tank; the first regeneration stirring tank is used for removing sulfate ions, sulfite ions and fluorine ions in the alkali liquor. The first regeneration stirring tank is used for removing sulfate ions, sulfite ions and fluorine ions in alkali liquor, so that the technical problem that a large number of crystalline substances are generated in the tower after the alkali washing tower operates for a period of time, and consequently a pipeline is blocked can be effectively solved. According to the control method, on one hand, it can be guaranteed that the electronic-grade sulfur hexafluoride alkali washing device is in a continuous working state all the time; on the other hand, the concentration of the solution can be quickly improved and enriched.

Description

technical field [0001] The invention relates to an electronic-grade sulfur hexafluoride alkaline cleaning device and a control method thereof. Background technique [0002] At present, sulfur hexafluoride is a new generation of ultra-high voltage insulating dielectric materials. As a good gas insulator, it is widely used for gas insulation of electronic and electrical equipment. Electronic grade high-purity sulfur hexafluoride is an ideal electronic etchant, widely used in the field of microelectronics technology, as a plasma etching and cleaning agent in the manufacture of large integrated circuits such as computer chips and LCD screens. It is used as a fluorine source for the production of fluorine-doped glass in the preparation of optical fibers, and as a dopant for the isolation layer in the manufacture of low-loss and high-quality single-mode fibers. It can also be used as a doping gas for nitrogen excimer lasers. It is used as tracer, standard gas or preparation of ...

AI Technical Summary

Problems solved by technology

However, in the actual operation process, there is a phenomenon that seriously affects the leaching efficiency of the alkali washing tower, that is, after a period of operation of the alkali washing tower, a large amount of crystalline substances are produced in the tower, which leads to blockage of the pipeline, the crude gas cannot be rinsed, and the system cannot normal operation

Only when the clogged tower is stopped and cleaned can it be used normally. Cleaning up the crystallization of the alkali washing tower will cost a lot of manpower and material resources, which is not conducive to the normal production and operation of sulfur hexafluoride

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