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Transport module latching door

A locking mechanism, door bracket technology, applied in electrical components, transportation and packaging, special packaging objects, etc., can solve the problems of unstable operation device, accidental contact, instability, etc., to achieve effective and reliable locking action, stable operation, mechanical Construct simple effects

Inactive Publication Date: 2004-10-06
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the rotation of this handle provides a very unstable operating device which results in an uneven and cumbersome movement and removal of the door from the door opening of the closure part.
This jerky operation can lead to accidental contact of the door and closure at the door opening, resulting in scratched particles, damage to wafers in the container, particles in the wafer carrier, or other undesirable results

Method used

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  • Transport module latching door
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  • Transport module latching door

Examples

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Embodiment Construction

[0036] The prior art SMIG container 20 with bottom opening and delivery assembly 30 with front opening shown in FIGS. 1 and 2 respectively are well suited for the present invention. Each sealable closure has a container portion 34 and a cooperating door 36, respectively. The SMIF container 20 also has a separate wafer carrier 38, which is a carrier in the shape of an H-bar known in the art, and this H-bar-shaped carrier is placed on on the top surface 40 of the door 36 .

[0037] Each container portion 34 and each closure has a top side 46 , a front side 48 and a bottom side 50 . In a SMIF container, bottom side 50 is open to receive wafer 38 and door 36 .

[0038] The door has an inwardly facing side 52 and an outwardly facing side 53 with an edge 55 including a closure 56 having an open interior 58 containing a latching mechanism 60, some of which are depicted in FIGS. 1 and 2 . The latch mechanism includes a latch portion 62 that may extend outside of the slot 66 for eng...

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PUM

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Abstract

A wafer container with door receiving frame and a door sized therefor. The door (94) includes latching linkages (250, 252) that extend, lift, lower and retract latching portions from the door and into and out of latch receptacles (150) in the door frame. Each latching mechanism utilizes a sliding plate (210) with a connected handle (170, 172) exposed on the front of the door. The sliding plate has lifting linkages (220, 222) cooperating with the latching linkages. Moving the handles extends the latching portions into the latching receptacles. By way of a ramped surface (226) and follower surface (277) on the overlapping linkages, the latching portions then move in a direction normal to the first direction to pull the door inwardly and seal the door to the container. The sliding plate includes a rack portion (224) engaged with a pinion (290). The pinion is accessible from the door front by a latch key (300).

Description

technical field [0001] The present invention relates to a wafer container and, more particularly, to a sealable wafer enclosure having a door with a latch mechanism on the door. Background technique [0002] In order to seal the wafers in the container, professionals use various methods. For storing and transporting wafers, some containers have a rigid body with vertically disposed slots for accommodating the wafers, and a flexible snap-on lid. These containers are generally not suitable for wafers that cannot be exposed to the outside atmosphere. [0003] For wafers in the size range of 200 mm or less, a container 20 commonly referred to as SMIF (Standardized Mechanical Interconnection Facility) shown in FIG. without exposing the wafer to external atmospheric conditions. Examples of such containers can be seen in US-4,532,970 and US-4,534,389. This SMIF container usually adopts a transparent container part 34, wherein there is a door bracket part...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673
CPCH01L21/67373B65D85/30
Inventor 格雷戈里·W·博里斯迈克尔·C·扎布卡
Owner ENTEGRIS INC