Fast open/close photoelectric generator for photoelectric relay
A technology of photoelectric generators and devices, applied in photovoltaic power generation, circuits, electrical components, etc., can solve problems such as reducing off-time and increasing on-time
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[0024] refer to figure 1 with 2 , showing a PVG of the type shown in U.S. Patent No. 5,549,762, wherein a wafer 20 is supported or processed ( figure 1 ) has a thin epitaxial SOI silicon layer 21 adhered thereto with an oxide insulating layer 22 . A plurality of wells 30 , 31 , 32 , 33 and 34 are defined by webs 35 of non-conductive polysilicon filler. Each well 30-34 has a bottom N + Layer 36. Wall plate 35 may be formed with a thin oxide layer 35a and intrinsic polysilicon fill 35b in the etched trench. Each well 30-34 has a shallow P + Diffusion regions 40-44 and N + The contact diffusion area ( figure 1 50 and 51) to connect in series figure 1 unit shown.
[0025] According to the present invention, formed in figure 1 A plurality of slotted wells schematically shown as 60-63 are made vertically through the SOI layer 21 and identical slotted wells are provided on the entire surface of the SOI layer 21 ( figure 2 ). Each well is formed as the walls 35 of th...
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