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Spiralism type throttle

A throttle valve and rotary vane technology, applied in the field of throttle valve, can solve the problems of taking a long time, slow response speed of butterfly valve, long rotation stroke, etc., and achieve the effect of reducing weight, reducing load and prolonging service life.

Inactive Publication Date: 2007-01-03
MACRONIX INT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Due to the long stroke of the known butterfly valve, in order to greatly change the flow rate of the fluid, it will take a relatively long time to rotate the above-mentioned rotary valve to the set angle.
In addition, since the movement direction of the rotary valve of the butterfly valve is parallel to the direction of the flow field of the fluid, this will make the rotary valve vulnerable to the positive thrust of the fluid, resulting in the slow response of the butterfly valve to the adjustment of the fluid flow rate.

Method used

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  • Spiralism type throttle
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Embodiment Construction

[0029] Please also refer to figure 2 and image 3 ,in figure 2 It is a schematic longitudinal sectional view of a rotary vane throttle valve in a preferred embodiment of the present invention, and image 3 A perspective view of a fixed valve and two rotary valves. Such as figure 2 As shown, the rotary vane throttle valve 200 is mainly composed of a valve body 210 , a fixed valve 220 , a first rotary valve 230 , a second rotary valve 240 and a rotary device 250 . The valve body 210 has a fluid conduit 212, which runs through the valve body 210 and is approximately hollow cylindrical and has an inner ring wall 214, and the fluid flows in the same direction or in the opposite direction according to the direction of the hollow arrow in the figure. Inside the conduit 212.

[0030] Such as figure 2 and image 3 As shown, the fixed valve 220 is composed of a fixed cylinder 222 and a plurality of fixed blades 224, wherein the fixed cylinder 222 is located on the axis of the...

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PUM

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Abstract

A rotary vane type throttle valve is composed of a valve body with a fluid guiding tube, a fixed valve gate in said fluid guiding tube and consisting of a fixing post and several fixed vanes, two rotary valve gates composed of a rotary post and several rotary vanes, and a rotor coupled to said two rotary valve gates for driving their rotary vanes to move in different direction, so changing the flow speed of fluid.

Description

technical field [0001] The present invention relates to a throttle valve, and in particular to a rotary vane throttle valve. Background technique [0002] Valve is the most widely used part in semiconductor process equipment. The purpose of using the valve is to control the flow of fluid in the pipe. Therefore, almost the entire semiconductor process equipment starts from the gas source (Gas Source) and goes through many stages. There are valves from the pipeline to the reactor, all the way to the exhaust end of the vacuum system (Exhaust). According to the purpose of the valve, the valve can be roughly divided into on-off (On / Off) valves and adjustable (Adjustable) valves. Among them, the on-off valve is mainly used to cut off or continue the flow of fluid between certain points, while the adjustable valve is used to adjust the flow of fluid in the pipe fittings. [0003] Throttle Valve is an adjustable valve commonly used in vacuum systems. In order to control the flow r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K3/04
Inventor 陈建维
Owner MACRONIX INT CO LTD