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Bellows supporting structure and movable stage

A corrugated pipe and structure technology, applied in the field of corrugated pipe support structure and movable mounting table device, can solve problems such as damage and reduced durability of corrugated pipe

Inactive Publication Date: 2005-11-23
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Uneven expansion and contraction of the bellows reduces the durability or breakage of the bellows

Method used

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  • Bellows supporting structure and movable stage
  • Bellows supporting structure and movable stage
  • Bellows supporting structure and movable stage

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0071]In the embodiment, a rail is exemplified as the guide member (guide rail), but the guide rail may be a roller conveyor (roller bearing) that connects rollers in the longitudinal direction. In this case, the moving part moves on a roller conveyor. The rails (guide members) are not limited to the upper and lower portions, and may be arranged on the left and right.

[0072] The chamber in which the movable table is installed is not limited to a vacuum, and may be filled with, for example, a predetermined gas (air, gas, etc.) or liquid (water, chemical solution, etc.). The pressure in the chamber can also be normal pressure, positive pressure, or negative pressure. When used in a corrosive gas environment, the bellows is not limited to metal, and may be made of a corrosion-resistant material such as Teflon (registered trademark of teflon polytetrafluoroethylene).

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PUM

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Abstract

A structure for supporting a bellows (1) from the inside has a guiding track (8) provided inside the bellows and extending in the axial direction of the bellows. A moving member (10) is provided so as to be movable in the bellows' axial direction on the guiding track. The moving member and the bellows are connected by an intermediate supporting member (5).

Description

technical field [0001] The present invention relates to a bellows support structure and a movable table device capable of preventing stress concentration from easily occurring when the bellows has a long stroke. In particular, the present invention relates to such techniques that may be suitably utilized within semiconductor processing systems. Here, semiconductor processing means forming semiconductor layers, insulating layers, conductive layers, etc. Various processes performed on the substrate to be processed to manufacture semiconductor devices or manufacture structures including wiring, electrodes, etc. for connection to semiconductor devices. Background technique [0002] In semiconductor device manufacturing, a substrate to be processed (object to be processed), such as a semiconductor wafer, is often moved or transferred within a vacuum chamber. In this case, a movable part and a fixed part that move linearly are connected in a vacuum chamber, and a bellows is used...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/07F16J3/04H01L21/677
CPCF16J3/048H01L21/67742H01L21/02
Inventor 广木勤
Owner TOKYO ELECTRON LTD