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Excited quasi-molecular lampbulb

A technology of excimer lamps and outer tubes, which is applied in the direction of discharge lamps, discharge tubes/lamps, components of gas discharge lamps, etc., and can solve the problem of reducing the amount of light, reducing the amount of light, uniformity, and insufficient uniformity, etc. problem, to achieve the effect of reducing the amount of light, stabilizing and uniformizing the discharge, and deteriorating the uniformity

Active Publication Date: 2010-05-05
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the amount of light on the surface of the object to be processed directly below the support plate 17 decreases, which not only reduces the overall amount of light, but also makes the uniformity insufficient.
[0011] Even if a light-transmitting material is used as the support plate 17, it is inevitable that the discharge does not occur, and the light absorption caused by the support plate cannot be completely eliminated, so it is unavoidable that the amount of light on the surface of the object directly below the support plate decreases and the deterioration of uniformity.

Method used

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  • Excited quasi-molecular lampbulb
  • Excited quasi-molecular lampbulb
  • Excited quasi-molecular lampbulb

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] exist figure 1 Among them, (a) is a sectional view in the pipe axis direction, and (b) is a sectional view in the radial direction.

[0029] Between the outer tube 11 and the inner tube 12 in the discharge space S, a support plate 20 is provided to fit the inner tube 12. As shown in (b), on the support plate 20, toward the direction of the light extraction part, In the case shown in the figure, a notch 21 is formed downward. The notch 21 is cut as large as possible so as to support the inner tube 12 with respect to the outer tube 11 without obstructing it.

[0030] The above-mentioned support plate 20 is inserted into the inner tube, and a part thereof is welded or bonded 22 to the inner tube 12 to restrict movement around the inner tube 12 in the rotational direction and in the axial direction.

Embodiment 2

[0032] exist figure 2 In the second embodiment, the supporting plate 20 formed with the notch 21 is welded or bonded 23 to the outer tube 11 at a part of its outer circumference, and other than that, it is the same as the first embodiment.

[0033] As shown in Embodiment 1 and Embodiment 2 above, any one of the support plate 20 being welded or bonded to the inner tube 12 at the inner peripheral edge, or welded or bonded to the outer tube 11 at the outer peripheral edge can be used. When considering the assembly process of the discharge vessel 13, it is preferable that the support plate 20 is fixed to the inner tube 12 as shown in Embodiment 1.

[0034] That is, the assembly of the discharge vessel 13 is performed by inserting the support plate 20 into the outer tube 11 in a state where the support plate 20 is attached to the inner tube 12, and by joining the two at the ends, so that the support plate 20 is fixed on the inner tube 12. , the insertion into the outer tube 11 ca...

Embodiment 3

[0036] exist image 3 In Example 3, a recess 24 is formed in the outer tube 11 at a position below the notch 21 of the support plate 20 . The recess 24 can be formed by pressing the rod-shaped body after baking and softening the outer tube 11 with a burner. At this time, the recess 24 acts to lift the support plate 20 upward in the discharge space S, that is, toward the upper inner surface of the outer tube 11 , and presses the support plate 20 toward the outer tube 11 . The recess 24 restricts movement of the support plate 20 in the rotational direction.

[0037] Further, small protrusions 25 formed on both sides of the support plate 20 are formed on the inner tube 12 to restrict movement of the support plate 20 in the axial direction of the inner tube 12 . The small protrusions 25 are formed by heating and softening a quartz glass rod and welding it to the inner tube 12 .

[0038] In this third embodiment, the outer tube 11 of the support plate 20 is brought into contact ...

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Abstract

The invention provides an excimer lamp, a support plate which prevents illuminance from decreasing and uniformity of the illuminance from deteriorating, where the support plate prevents the inner tubeof a dual cylindrical discharge container from bending. A notch is formed along a light extracting direction in the support plate which is mounted between the inner tube and the outer tube making upthe discharge container, to support the inner tube, and to prevent the inner tube from bending.

Description

technical field [0001] The invention relates to an excimer lamp, in particular to an excimer lamp for discharging by interposing a dielectric material. Background technique [0002] Excimer lamps have a characteristic of strongly emitting vacuum ultraviolet light of a single wavelength, and it is well known that in excimer lamps using, for example, xenon gas as a discharge gas, vacuum ultraviolet light with a wavelength of 172 nm is emitted, and the loaded The lamp light irradiation device is used for decomposing and removing organic matter attached to the surface of a panel substrate of a liquid crystal panel display element, for surface modification of a panel substrate, and the like. [0003] Figure 8 A conventional excimer lamp 50 is shown, (a) is a sectional view in the tube axis direction; (b) is a sectional view in the radial direction. [0004] The excimer lamp 50 includes, for example, a discharge vessel 13 of a double cylindrical tube structure in which an outer ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J65/00
CPCH01J9/247H01J61/34H01J65/046
Inventor 广濑贤一清濑正秀住友卓
Owner USHIO DENKI KK
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