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Method for manufacturing microlens and apparatus for manufacturing the same

A manufacturing method and a manufacturing device technology, which are applied in the field of manufacturing microlenses, can solve problems such as small degrees of freedom and difficulty in ensuring the adhesion between microlenses and substrates

Inactive Publication Date: 2006-01-18
SEIKO EPSON CORP
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  • Abstract
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  • Claims
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Problems solved by technology

[0007] However, in the method of adjusting the surface energy on the substrate, the shape of the microlens largely depends on the surface energy of the substrate, and the degree of freedom in design is small
In addition, since the microlenses are formed on a substrate that has been subjected to a lyophobic treatment, it becomes difficult to ensure the adhesion of the microlenses to the substrate

Method used

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  • Method for manufacturing microlens and apparatus for manufacturing the same
  • Method for manufacturing microlens and apparatus for manufacturing the same
  • Method for manufacturing microlens and apparatus for manufacturing the same

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Embodiment Construction

[0022] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each drawing used in the following description, in order to make each member a recognizable size, the scale of each member is appropriately changed.

[0023] [Manufacturing method of micro lens]

[0024] figure 1 It is a schematic diagram showing the manufacturing method of the microlens in this embodiment. The method of manufacturing a microlens of this embodiment is a method of manufacturing a microlens by ejecting a droplet 22 containing a constituent material of the microlens from a droplet ejection head 34 and landing on the substrate 5. After the droplet 22 is ejected Until just after the bounce, the ejected droplets 22 are irradiated with ultraviolet rays 62 at least once.

[0025] [Material of the micro lens]

[0026] As a constituent material (lens material) of the microlens, a translucent resin having ultraviolet curability is used. As the transluc...

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Abstract

A method for manufacturing a microlens includes: ejecting liquid drops containing a material for forming microlenses from a liquid drop ejection head to make the liquid drops land on a substrate; and irradiating the liquid drops with ultraviolet light at least once at a time period between after the ejection of the liquid drops and immediately after the landing of the liquid drops on the substrate. In addition, an apparatus for manufacturing a microlens, includes: a liquid drop ejection head that ejects liquid drops containing a material for forming microlenses; a table that supports a substrate above which the microlenses are to be formed; and an ultraviolet light radiating device that irradiates with ultraviolet light one of: the liquid drops that are flying from the liquid drop ejection head to the substrate; and the liquid drops that has landed on the substrate.

Description

Technical field [0001] The present invention relates to a manufacturing method of a micro lens and a manufacturing device of a micro lens. Background technique [0002] In recent years, optical devices having a plurality of micro lenses called micro lenses have appeared. [0003] Such an optical lens includes, for example, a spectroscope equipped with a laser, an optical interconnection of an optical fiber, and a solid-state imaging element including a condenser lens for condensing incident light, and the like. [0004] As a method of manufacturing such microlenses, the inkjet method is being studied. In this method, from a fine nozzle formed on an inkjet head, droplets of a constituent material containing a microlens are ejected onto a substrate and cured to form a microlens. [0005] In the inkjet method, in order to prevent clogging of fine nozzles, the liquid material that can be ejected is limited to a relatively low viscosity liquid of 50 cps (mPa·s) or less. However, for l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29D11/00
CPCB29D11/00365B29C41/12B29L2011/0016B29C41/36G02B1/041G02B3/0012G02B3/005
Inventor 长谷井宏宣
Owner SEIKO EPSON CORP
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