Test fixture in high frequency measuring chip of laser in structure of monocoplanar electrode
A technology of test fixtures and lasers, which is applied in the direction of single semiconductor device testing, semiconductor/solid-state device testing/measurement, etc. It can solve the problems of inaccurate measurement, inability to remove the chip, and damage to the chip that increases the complexity of the measurement.
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[0021] see figure 1 Shown, a kind of high-frequency test jig of the present invention measures non-coplanar electrode laser chip, comprises:
[0022] A plurality of conductor plates 10, the conductor plates 10 are rectangular, and the plurality of conductor plates 10 are stacked and welded to form a multi-step structure 20; the material of the conductor plates 10 is gold-plated glass ceramics; the multi-step structure 20 is graded from 2 to 15;
[0023] The drop of the multi-step structure 20 is not the same; the multi-step structure 20 with different drop is from small to large or from large to small; the difference between two adjacent steps of the multi-step structure 20 is 5 μm ; Each step surface of the multi-step structure 02 is plated with a metal indium layer, and is made with a corresponding step number.
[0024] see figure 2 Shown, the manufacturing schematic diagram of a kind of non-coplanar electrode semiconductor laser test fixture of the present invention, co...
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