Transferring method
A transfer method and transfer body technology, applied in the transfer field, can solve problems such as difficulties
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Embodiment 1
[0162] A quartz substrate (softening point: 1630° C., deformation point: 1070° C., excimer laser transmittance: approximately 100%) of 50 mm in length × 50 mm in width × 1.1 mm in thickness was prepared, and on one surface of the quartz substrate, the Low pressure CVD method (Si 2 h 6 gas, 425°C) to form an amorphous silicon (a-Si) film as a separation layer (laser absorbing layer). The film thickness of the separation layer was 100 nm.
[0163] Secondly, the ECR-CVI method (SiH 4 +O 2 gas, 100°C) to form SiO 2 membrane as an intermediate layer. The film thickness of the intermediate layer was 200 nm.
[0164] Secondly, use CVD method on the intermediate layer (Si 2 h 6 gas) to form a polysilicon film with a film thickness of 50 nm as the transferred layer. Thereafter, a predetermined pattern is etched on the polysilicon film to form regions to be source, drain, and channel of the thin film transistor. Thereafter, the surface of the polysilicon film is thermally oxid...
Embodiment 2
[0173] Transfer of the thin film transistor was performed in the same manner as in Example 1 except that the separation layer was made of an amorphous silicon film containing 20 at % H (hydrogen). In addition, the amount of H in the amorphous silicon film is adjusted by appropriately setting the conditions at the time of film formation by the low-pressure CVD method.
Embodiment 3
[0175] In addition to making the separation layer a ceramic thin film (composition: PbTiO 3 , film thickness: 200 nm), the transfer of the thin film transistor was carried out in the same manner as in Example 1.
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