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Elongate vacuum system for coating one or both sides of a flat substrate

A vacuum system and substrate technology, applied in vacuum evaporation coating, coating, sputtering coating, etc., can solve problems such as eddy current generation, vacuum pump performance value decline, and adverse effects on the discharge process.

Inactive Publication Date: 2007-01-24
冯·阿德纳设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, the two air flows in opposite directions of the discharge sub-compartment meet each other, causing turbulence and adversely affecting the discharge process, and the performance value of the vacuum pump is reduced

Method used

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  • Elongate vacuum system for coating one or both sides of a flat substrate
  • Elongate vacuum system for coating one or both sides of a flat substrate

Examples

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Embodiment Construction

[0067] figure 1 The extended vacuum system shown in is used for double-sided coating of a flat substrate 1 during one cycle through the system. The vacuum system consists of four evacuation compartments 2 and three coating compartments 3 which are separated from each other by a partition wall 4 . The substrate 1 is conveyed through the coating system by means of a conveying system not shown in the conveying platform 5, whereby access to and from the coating system and from one compartment to the next is achieved by a gate 6 located in the compartment inside the partition wall 4.

[0068] In this embodiment, all partial compartments in the upper outer wall 7 and the lower outer wall 8 have upper and lower openings 10, 23 which can be tightly closed by covers 11 of the same size. The evacuated compartment 3 also comprises a vacuum connection 16 in the cover 11a which closes the openings in the lateral outer walls 9, whereby, in this embodiment, these lateral covers 11a exhibit...

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Abstract

The present invention relates to an elongated vacuum system for coating one or both sides of a flat substrate which is moved by the system. The vacuum system comprises at least one magnetron with a region around the magnetron and is divided into successive compartments by sealable partition walls along the conveying direction of the substrate. The compartment can be evacuated directly via a vacuum port located on the compartment, or indirectly via a suction opening in the partition wall. The at least one compartment includes an upper partial compartment located above the base, the partial compartment including a sealable upper opening in at least one outer wall thereof. The object of the present invention is to produce an elongated vacuum system for flexible application according to the requirements of different one-side and two-side coating processes and to carry out this process within said system which ensures stability, differentiation and process optimization sputtering atmosphere. This object is achieved by the fact that in at least one of the upper partial compartments horizontal and / or vertical elements can be installed for dividing said upper partial compartment into several sub-compartments.

Description

technical field [0001] The present invention relates to an elongated vacuum system for applying a coating to one or both sides of a flat substrate through which the substrate can be moved within a conveying platform using a conveying system. The vacuum system comprises at least one magnetron provided with a region around the magnetron and is divided into successive compartments along the conveying direction of the substrate by a closable partition wall with a suction port on which the magnetron can be positioned The vacuum connection on the compartment is evacuated directly or indirectly by the suction opening in the partition wall. At least one compartment comprises an upper partial compartment above the base, said partial compartment comprising a closable upper opening on at least one of its outer walls. Background technique [0002] In publication EP 1 179 516 A1 a coating system is disclosed which is capable of coating both sides of a flat substrate during one transport...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56
CPCC23C14/568
Inventor 沃尔夫冈·埃尔布卡姆迪特马尔·舒尔策延斯·梅尔歇尔奥拉夫·加韦
Owner 冯·阿德纳设备有限公司
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