Apparatus for substrate marking
A substrate and linear technology, applied in the field of substrate scribing devices, can solve problems such as difficulty in forming accurate scribing lines
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[0040] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. However, this invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. The embodiments are, of course, provided as teaching examples of the invention. The same reference numerals denote the same elements.
[0041] Figure 4 is a front view for explaining the structure of an apparatus for scribing a substrate according to an embodiment of the present invention, and Figure 5 is an exemplary diagram for explaining a driving state of an apparatus for scribing a substrate according to an embodiment of the present invention.
[0042] Such as Figure 4 As shown, the device for scribing a substrate includes: a wheel 46 for forming a scribe line on a substrate 50; Pressing part; Lifting head 44, VCM 45 is installed at the lifting head 44; Servo m...
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