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Capacitive pressure sensor

A pressure sensor, capacitive technology, applied in the fluid pressure measurement using capacitance change, fluid pressure measurement through electromagnetic elements, and elastic deformation meter type fluid pressure measurement, etc., can solve the problem of occupying installation space and achieve miniaturization. Effect

Inactive Publication Date: 2007-05-09
YAMATAKE HONEYWELL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Furthermore, when a plurality of pressure sensors are installed individually, there will be a problem of occupying the corresponding installation space
[0008] Moreover, the above-mentioned problem is not only a problem that occurs when measuring the pressure close to vacuum. For example, in the vulcanizing machine of the tire manufacturing device, the pressure close to the atmospheric pressure must be strictly measured. The very high pressure inside the working machine, in applications with such two different pressure measurement areas, also generally creates the above problems

Method used

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Embodiment Construction

[0027] Hereinafter, a capacitive pressure sensor 1 (hereinafter referred to as "pressure sensor 1") according to an embodiment of the present invention will be described. The pressure sensor 1 according to one embodiment of the present invention is shown in FIG. 1 and has: a base portion 11, which is made of aluminum oxide (Al 2 O 3 ) Is composed of single crystal sapphire; the diaphragm 12 is also composed of sapphire; the pressure-sensitive electrodes 111, 121 and the reference electrodes 112, 122 are arranged oppositely in the capacitor chamber 13 formed by the base portion 11 and the diaphragm 12. Furthermore, the pressure sensor 1 is supported by a cover plate 15 made of sapphire and a metal plate 16 made of a metal corrosion-resistant material indicated by a two-dot chain line in the figure.

[0028] In addition, the base portion 11 and the diaphragm 12 are directly joined as described in Patent Document 1 above.

[0029] A through hole 11b is formed in the base part 11, whi...

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Abstract

The invention provides a capacitive pressure sensor. A capacitive pressure sensor (1) provided with a capacitance detecting section formed at least partially in an opposing region within a capacity chamber comprising a diaphragm, i.e. a pressure sensitive capacitance detecting section (101) formed in a region high in sensitivity to the pressure of the diaphragm and a reference capacitance detecting section (102) formed in a region low in sensitivity to the pressure of the diaphragm, in which the entire size is reduced and excellent reliability is ensured by detecting the signal output value at the reference capacitance detecting section (102) independently.

Description

Technical field [0001] The present invention relates to a capacitive pressure sensor, in particular to a capacitive pressure sensor which is very suitable for measuring the pressure of different pressure measurement areas. Background technique [0002] For example, in the semiconductor chip manufacturing process, a pressure sensor having a structure having a capacitance detection portion in a capacitor chamber partially made of a diaphragm is widely used (for example, refer to Japanese Patent Application Laid-Open No. 2002-111011 as Patent Document 1). [0003] A vacuum pressure sensor for measuring the pressure of such a semiconductor chip manufacturing process or other vacuum devices has two independent vacuum pressure sensors: an atmospheric pressure sensor, which is set in the vacuum chamber, and is used for feeding or removing silicon wafers as substrates. Or as a semiconductor chip of a product, confirm that the vacuum chamber has become atmospheric pressure; a vacuum press...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/12G01L1/14G01L9/00G01L15/00
CPCG01L9/125G01L9/12G01L9/0075G01L7/08
Inventor 吉川康秀石仓义之山口彻
Owner YAMATAKE HONEYWELL CO LTD