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Capacitive pressure sensor

A pressure sensor, capacitive technology, applied in fluid pressure measurement using capacitance changes, fluid pressure measurement through electromagnetic components, elastic deformation gauge fluid pressure measurement, etc., can solve the problem of occupying installation space and so on

Inactive Publication Date: 2010-05-05
YAMATAKE HONEYWELL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, when a plurality of pressure sensors are installed individually, there will be a problem of occupying the corresponding installation space
[0008] Moreover, the above-mentioned problem is not only a problem that occurs when measuring the pressure close to vacuum. For example, in the vulcanizing machine of the tire manufacturing device, the pressure close to the atmospheric pressure must be strictly measured. The very high pressure inside the working machine, in applications with such two different pressure measurement areas, also generally creates the above problems

Method used

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Embodiment Construction

[0024] Hereinafter, a capacitive pressure sensor 1 (hereinafter referred to as "pressure sensor 1") according to one embodiment of the present invention will be described. A pressure sensor 1 according to an embodiment of the present invention is as figure 1 As shown, there is: a base portion 11 made of aluminum oxide (Al 2 o 3 ) composed of single crystal sapphire; diaphragm 12, which is also composed of sapphire; pressure-sensitive electrodes 111, 121 and reference electrodes 112, 122 arranged oppositely in capacitor chamber 13 formed by base part 11 and diaphragm 12. Furthermore, the pressure sensor 1 is supported by a cover plate 15 made of sapphire and a metal plate 16 made of a metal corrosion-resistant material indicated by a two-dot chain line in the figure.

[0025] In addition, between the base part 11 and the diaphragm 12, as described in the above-mentioned Patent Document 1, they are directly bonded.

[0026] A via hole 11b is formed in the base portion 11 for ...

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Abstract

The invention provides a capacitive pressure sensor. A capacitive pressure sensor (1) provided with a capacitance detecting section formed at least partially in an opposing region within a capacity chamber comprising a diaphragm, i.e. a pressure sensitive capacitance detecting section (101) formed in a region high in sensitivity to the pressure of the diaphragm and a reference capacitance detecting section (102) formed in a region low in sensitivity to the pressure of the diaphragm, in which the entire size is reduced and excellent reliability is ensured by detecting the signal output value atthe reference capacitance detecting section (102) independently.

Description

technical field [0001] The present invention relates to capacitive pressure sensors, and in particular to capacitive pressure sensors which are very suitable for measuring the pressure in different pressure measuring regions. Background technique [0002] For example, in a semiconductor chip manufacturing process, a pressure sensor having a capacitive detection unit in a capacitive chamber partially made of a diaphragm is widely used (for example, refer to Japanese Patent Laid-Open No. 2002-111011 as Patent Document 1). [0003] The vacuum pressure sensor for measuring the pressure in such a semiconductor chip manufacturing process or other vacuum devices has two independent vacuum pressure sensors: an atmospheric pressure sensor, which is installed in a vacuum chamber, and is used when carrying in or taking out, for example, a silicon wafer as a substrate. Or as a product semiconductor chip, confirm that the vacuum chamber has become atmospheric pressure; vacuum pressure se...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/12G01L1/14G01L9/00G01L15/00
CPCG01L9/12G01L9/0075G01L9/125G01L7/08
Inventor 吉川康秀石仓义之山口彻
Owner YAMATAKE HONEYWELL CO LTD