High-frequency element, power supply element, and communication device

一种高频元件、高频信号的技术，应用在电源供给元件,高频元件领域，能够解决难以得到滤波特性、振子时间变动等问题，达到防止振子的破坏、抑制时间变动、可靠性高的效果

Inactive Publication Date: 2007-07-04
SONY GRP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] For example, a high-frequency filter composed of MEMS (micro-electromechanical system) elements has been proposed. In such a high-frequency filter, when the DC bias voltage fluctuates, the impedance of the vibrator will fluctuate over time, making it difficult to obtain good filtering. characteristic

Method used

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  • High-frequency element, power supply element, and communication device
  • High-frequency element, power supply element, and communication device
  • High-frequency element, power supply element, and communication device

Examples

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Embodiment Construction

[0042] The high-frequency element according to the embodiment of the present invention has a high-frequency signal element including an electrostatically driven vibrator operated by applying a DC bias voltage, and an additional electrode is placed between a pad for supplying a DC bias voltage and the vibrator. It is composed of a circuit with the function of stabilizing the DC bias voltage.

[0043] As a high-frequency signal element, a circuit element may have a vibrator group that passes a high-frequency signal in parallel through a plurality of electrostatically driven vibrators to perform signal processing.

[0044] As a circuit having a function of stabilizing the DC bias voltage, a resistor inserted in series in the DC power supply line and a capacitor inserted between the DC power supply line and the ground can be configured.

[0045] In addition, a circuit having a function of stabilizing the DC bias voltage may be provided on the same substrate on which the high-frequ...

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Abstract

There is provided a high-frequency element capable of stabilizing DC bias voltage applied to an electrostatic drive type vibrator and a power supply element capable of supplying a stable DC bias voltage. There is also provided a communication device including a filter using the high-frequency element. The high-frequency element includes a high-frequency signal element having an electrostatic drive type vibrator operated by applying DC bias voltage and a circuit having a function for stabilizing the DC bias voltage and arranged between a pad for supplying the DC bias voltage and the vibrator. The power supply element is used for driving the high-frequency element and includes a circuit having a function for stabilizing the DC bias voltage. The communication device is formed by using a filter using the high-frequency element.

Description

technical field [0001] The present invention relates to a high-frequency signal element having an electrostatically driven vibrator as a constituent element, and a high-frequency element having a DC voltage supply means for supplying a DC bias voltage to the high-frequency signal element. [0002] Furthermore, the present invention relates to a power supply element for supplying a DC bias voltage to the above-mentioned high-frequency signal element. [0003] Furthermore, the present invention relates to a communication device using a filter composed of the above-mentioned high-frequency element. Background technique [0004] In a high-frequency signal element including an electrostatically driven vibrator as a constituent element, a DC bias voltage is applied to the vibrator. When a DC bias voltage is supplied to such an electrostatically driven vibrator, for example, when a simple line is used for power supply, the voltage fluctuating due to the instability of the DC power...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/24H03H9/46B81B3/00H01H59/00H01L21/822H01L27/04H03H3/007H03H9/50H03H9/52
CPCH03H9/2426H03H3/0075H03H3/0073H03H9/505H03H9/525H03H9/2463H01L21/822H01L27/04H03H9/24H03H9/46
Inventor 田中均洋御手洗俊多田正裕难波田康治
Owner SONY GRP CORP
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