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Substrate for ink jet head with TaCr alloy protective layer, ink jet head utilizing the same and producing method therefor

a technology of ink jet head and protective layer, which is applied in printing and other directions, can solve the problems of peeling phenomenon, inability to generate bubbles, corrosion of wirings, etc., and achieve the effects of high precision, excellent adhesion and high reliability

Inactive Publication Date: 2008-07-01
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0016]An object of the present invention is to improve adhesion between an upper protective layer of a substrate for an ink jet head, having a portion coming into contact with an ink, and a resin layer, thereby providing an ink jet head and a substrate therefor capable of ensuring reliability over a prolonged period.
[0017]Another object of the present invention is to provide a substrate for an ink jet head with an improved adhesion between an upper protective layer and resin layer even in case of a smaller dot for a higher definition of a recorded image or of a longer recording element for a higher recording speed or in case of employing diversified inks thereby enabling a higher density of the head, an ink jet head provided with such substrate, and a producing method thereof.
[0018]Another object of the present invention is to provide a configuration of an upper protective layer realizing a high durability and a high reliability even for highly corrosive inks, thereby providing a substrate for an ink jet head and an ink jet head of a long service life and a producing method thereof.
[0022]Another object of the present invention is to provide a substrate for an ink jet head, having an excellent adhesion between an upper protective layer and a resin layer and enabling to form a pattern of a liquid flow path with a high precision thereby providing an ink jet head of a high reliability, also not causing a peeling of a member constituting a liquid flow path even in an ink jet head elongated to 0.5 inches or larger thereby ensuring a high reliability over a prolonged period, an ink jet head and a producing method thereof.
[0023]Another object of the present invention is to provide a substrate for an ink jet head enabling to form a pattern of a liquid flow path with a high precision by an excellent adhesion between an upper protective layer and a member constituting the liquid flow path, thereby ensuring a high reliability even in case of a smaller dot formation for achieving a higher definition in a recorded image or of a high-speed drive for achieving a high-speed recording, an ink jet head and a producing method thereof.

Problems solved by technology

Also in such heat acting portion, there results a phenomenon that a coloring material or an additive substance contained in the ink is decomposed in a molecular level by heating to a high temperature to form a difficultly soluble substance which is physically adsorbed on the upper protective layer.
Such adsorption of the difficultly soluble organic or inorganic substance on the upper protective layer causes an uneven heat conduction from the heat-generating resistor to the ink, thereby resulting in an unstable bubble generation.
However, in case of elongating an ink discharge element (to 0.5 inches or larger) for achieving a higher recording speed or in case of employing diversified inks containing additives for improving a light fastness or a gas resistance of the inks on a recording medium, there are generated strains by a difference in the linear expansion coefficient of such components, and by a stress in the resin layer constituting walls of the liquid flow path or the discharge port, and an influence on the interface by inks of new types, thus leading to a peeling phenomenon between the covering resin layer constituting the walls of the liquid flow path or the discharge port and the upper protective layer on the heater substrate.
Also, even in case an organic adhesion promoting layer is provided on the upper protective layer, there may result a peeling at the interface between the organic adhesion promoting layer and the upper protective layer to cause a penetration of the ink onto the substrate and to induce a corrosion of the wirings, thereby hindering satisfactory recording or reliability in quality over a prolonged period.

Method used

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  • Substrate for ink jet head with TaCr alloy protective layer, ink jet head utilizing the same and producing method therefor
  • Substrate for ink jet head with TaCr alloy protective layer, ink jet head utilizing the same and producing method therefor
  • Substrate for ink jet head with TaCr alloy protective layer, ink jet head utilizing the same and producing method therefor

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0068]In order to simply evaluate an adhesion between a Ta88Cr12 film 107 (representing a film with a composition ratio of Ta 88 at. % and Cr 12 at. %; hereinafter composition being represented in a similar manner) of the present example and an organic adhesion promoting film (polyether amide resin) 307, a tape peeling test was conducted after a pressure cooker test (PCT).

[0069]The tape peeling test was conducted in the following manner. On a silicon wafer bearing the upper protective layer 107, an organic adhesion promoting film (polyether amide resin) 307 was formed with a thickness of 2 μm, and squares of 1×1 mm in a checkerboard pattern of 10 (longitudinal)×10 (lateral)=100 squares were formed with a cutter knife on the organic adhesion promoting film 307. Then a PCT was conducted by immersion in an alkaline ink under conditions of 121° C. and 2.0265×105 Pa (2 atm.) for 10 hours. Thereafter, an adhesive tape was applied on the squares in the checkerboard pattern and peeled, and ...

examples 2 to 7

[0072]A method similar to that in Example 1 was employed to evaluate an adhesion of Ta100-xCrx films of different compositions after PCT, and the obtained results are shown in Table 2.

example 8

[0079]In the present example, a Si substrate or a Si substrate in which a driving IC is formed is used for a sample for evaluating the ink jet properties. In case of a Si substrate, an SiO2 heat accumulation layer 102 (FIG. 1) of a thickness of 1.8 μm is formed by thermal oxidation, sputtering or CVD, and, a Si substrate already having an IC is also subjected to a formation of an SiO2 heat accumulation layer in a preparation process.

[0080]Then an SiO2 interlayer insulation film 103 of a thickness of 1.2 μm was formed by sputtering or CVD. Then a Ta40Si21N39 heat-generating resistor layer 104 of a thickness of 50 nm was formed by reactive sputtering employing a Ta—Si target. This operation was conducted at a substrate temperature of 200° C. Then an Al film for the metal wiring 105 was formed with a thickness of 200 nm by sputtering.

[0081]Then a patterning was executed by a photolithographic process to form a heat acting portion 108 of 26×26 μm in which the Al film was eliminated. The...

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PUM

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Abstract

For improving adhesion between a protective layer having a portion coming into contact with ink in a substrate for an ink jet head, and a resin layer thereby ensuring reliability in quality over a prolonged period, the invention provides a substrate for an ink jet head including a heat-generating resistor constituting a heat generating portion, an electrode wiring electrically connected with the heat-generating resistor and an upper protective layer provided on the heat-generating resistor and the electrode wiring across an insulating protective layer, wherein after forming an upper protective layer in which a Ta layer is laminated on a layer formed by a TaCr alloy, said Ta layer is selectively patterned and selectively removed so that the liquid flow path member is formed in a portion where the layer formed by said TaCr alloy is exposed by said removing.

Description

TECHNICAL FIELD[0001]The present invention relates to a substrate for an ink jet head for recording or printing a character, a symbol or an image by discharging a functional liquid such as ink on a recording medium including paper, plastic sheet, cloth or article, an ink jet head employing such substrate and a producing method therefor.BACKGROUND ART[0002]A general configuration of a head employed in ink jet recording includes plural discharge ports, ink flow paths communicated with such discharge ports, and plural electrothermal converting elements for generating thermal energy to be utilized for ink discharge. The electrothermal converting elements are constituted by heat-generating resistors and electrodes for supplying electric power to the heat-generating resistors, and such electrothermal converting elements are covered by an insulation film to secure insulation among the electrothermal converting elements. Each ink flow path communicates, at an end opposite to the discharge p...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): B41J2/05B41J2/14B41J2/16
CPCB41J2/14129B41J2/1603B41J2/1628B41J2/1629B41J2/1646B41J2/1632B41J2/1642B41J2/1645B41J2/1631
Inventor SAITO, ICHIROYOKOYAMA, SAKAIOZAKI, TERUOSAKAI, TOSHIYASU
Owner CANON KK