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Method and apparatus for determining the focal position during imaging of a sample

A focus position, sample technology, applied in the direction of photoplate making process exposure device, installation, photoplate making process of pattern surface, etc., can solve the problems of high adjustment cost, wrong measurement results, etc., and achieve the effect of reducing calibration work and high precision

Active Publication Date: 2007-12-05
CARL ZEISS MIKROLMAGING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] Of course there are disadvantages, since impurities on the sample or interfering structures on the sample surface cause intensity changes which can lead to erroneous measurement results
The main problem with this approach is the high alignment cost when imaging the slits onto the CCD rows, since the slits (or rows) must be very narrow in order to be able to achieve high precision

Method used

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  • Method and apparatus for determining the focal position during imaging of a sample
  • Method and apparatus for determining the focal position during imaging of a sample
  • Method and apparatus for determining the focal position during imaging of a sample

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Embodiment Construction

[0079] FIG. 1 depicts an imaging optical system, for example a microscope, which is used for recording biochips. Finding the exact focus position is particularly problematic when examining biochips with the aid of a microscope, especially with a fluorescence microscope.

[0080] The microscope arrangement according to FIG. 1 essentially has an illumination source 1 , which generates an illumination beam path with an optical axis 2 , and an objective 3 through which the illumination source is imaged onto a sample 4 , in this case a biochip s surface. The light reflected or scattered by the sample surface reaches a receiving device 6 , for example a CCD camera, as an imaging beam path with an optical axis 5 .

[0081] In this case, the sample surface is imaged onto the receiving surface of the receiving device 6 by means of the imaging optics consisting of the objective lens 3 and the tube lens and can thus be observed or evaluated.

[0082] On the beam splitting surface 8 of ...

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Abstract

The invention relates to process which is used to determine the position of focal point when a sample (4) images, wherein field diaphragm is imaged on the sample, the image-forming is detected by means of a receiving device which is inclined relative to the field diaphragm, and is sensitive to the position, and the focal point position is decided according to the bright distribution on the receiving device. Additionally, the invention relates to a device which applies the process according to the invention. According to the invention, the process which is mentioned in former comprises superimposing at least part of image-forming of field diaphragm on the sample (4) by the image-forming of optical grating, obtaining the strength value of light which is reflected by the sample by means of the receiving device which is sensitive to the position, distributing the strength value on the position on the receiving device, thereby deciding the contrast value concerned the position, and deciding the position of contrast gravity which is equal to the current focal point position on the receiving device according to the contrast value.

Description

technical field [0001] The invention relates to a method for determining the focus position when imaging a sample, wherein a field diaphragm is imaged onto the sample and this imaging is detected by means of a position-sensitive receiving device inclined relative to the field diaphragm, And the focus position is determined according to the brightness distribution on the receiving device. Furthermore, the invention relates to a device for carrying out the method according to the invention. Background technique [0002] In order to accurately image the sample or the sample section by means of the imaging optics, it is necessary to position the sample precisely at the focal point of the imaging optics. If the image is not sharp, it is important to know by how much and in which direction the position of the sample relative to the imaging optics is to be changed and, if necessary, to derive corresponding adjustment commands which can be used for subsequent focusing. [0003] In...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/24G02B7/32G03F9/00G03F7/20G03F7/207
CPCG02B21/245G02B21/244G02B7/32G02B21/24G03F9/00G02B21/00
Inventor D·布布利茨D·格雷菲P·维斯特法尔
Owner CARL ZEISS MIKROLMAGING