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Lining method for fragile material base plate and apparatus therefor

A brittle material substrate, brittle material technology, applied in fine working devices, glass cutting devices, stone processing equipment, etc., can solve problems such as affecting product quality and reducing the yield of FPD substrate manufacturing.

Inactive Publication Date: 2008-01-02
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Any of the above-mentioned adverse phenomena will affect the quality of the product, and will become the cause of the decrease in the yield of FPD substrate manufacturing.

Method used

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  • Lining method for fragile material base plate and apparatus therefor
  • Lining method for fragile material base plate and apparatus therefor
  • Lining method for fragile material base plate and apparatus therefor

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Embodiment Construction

[0048] Hereinafter, a scribing method and an apparatus for a brittle material substrate according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0049] FIG. 1 is a schematic perspective view showing a scribing device in an embodiment of the present invention. The structure of this scribing device 1 includes a moving body 5 , a coating unit 21 , a drying unit 22 , and a scribing unit 23 . The moving body 5 can be driven in the y-axis direction by the ball screw 4 and the electric motor (motor) 6 along the pair of guide rails 3a, 3b, and can be positioned at a predetermined position. The brittle material substrate 90 is positioned and held on the workbench 2 by a positioning assembly (not shown in the figure). The brittle material substrate 90 held on the stage 2 is sequentially processed by the coating unit 21 , the drying unit 22 , and the scribing unit 23 , and moved to complete scribing.

[0050] The brittle mater...

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Abstract

The invention provides a scribing method and an apparatus for the same, by which scribe-lines crossing mutually are formed without causing a failure at the intersection points. When forming a plurality of scribe-lines on the surface of a brittle material substrate 90 in directions crossing mutually, island-like protective films Q are formed on the intersection points of the scribe-lines to relieve the load stress of a cutter wheel. Next, spot-stroking impacts of a short cycle are given along a 1st dividing line and a 2nd dividing line of the brittle material substrate 90 by the cutter wheel, so that vertical cracks 1, 2 having high penetration are formed in the inside of the brittle material substrate 90.

Description

technical field [0001] The present invention relates to a scribing method and device for a brittle material substrate, which is used for cutting glass substrates of flat panel displays (hereinafter referred to as FPDs), or various brittle material substrates called semiconductor wafers or ceramic sheets. , forming a plurality of intersecting strips on the surface of the brittle material substrate. Background technique [0002] Liquid crystal display screens, liquid crystal projector substrates, organic electroluminescent elements, etc., which are products related to FPDs, are used as transmission mechanisms for information including images and characters. In such an FPD, for example, a liquid crystal display formed by laminating a pair of glass substrates, in the manufacturing process thereof, a pair of mother glasses each having a large size are bonded to each other, and then cut into pieces. prescribed size. The scribing method and its apparatus described below were used...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B33/10B26F3/00B28D5/00C03B33/02C03B33/023C03B33/033H01L21/301
CPCC03B33/105C03B33/023Y02P40/57A45C13/30H04M1/17
Inventor 前川和哉
Owner MITSUBOSHI DIAMOND IND CO LTD
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