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Microelement and manufacturing method

A manufacturing method and micro-component technology, which can be used in nonlinear optics, instruments, optics, etc., and can solve problems such as process complexity.

Inactive Publication Date: 2008-01-02
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, since the isolation layer is a step-difference structure formed by two processes, and a barrier layer needs to be formed in the flow channel, the process will be complicated.

Method used

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Embodiment Construction

[0022] In order to make the above and other objects, features and advantages of the present invention more comprehensible, a preferred embodiment is exemplified below and described in detail in conjunction with the accompanying diagrams.

[0023] Referring to FIG. 2 a , the microcomponent 100 of the present invention includes a substrate 110 , a conductive layer 120 , an isolation layer 130 , and a solution 140 , wherein the substrate 110 can be made of glass as the base of the entire microcomponent.

[0024] The conductive layer 120 is formed on the substrate 110 between the substrate 110 and the isolation layer 130 , and can be made of indium tin oxide (ITO), and can be used as an electrode of the micro-component 100 .

[0025] The isolation layer 130 is disposed on the conductive layer 120 of the substrate 110, and defines a groove 131 and a guiding channel 132 therein, as shown in FIG. 132 communicates with the groove 131 and has a plurality of step portions 132 ′. By chan...

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Abstract

The invention relates to a microelement and the manufacturing method thereof. And the microelement comprises a substrate, a separation layer and a solution, where the separation layer is arranged on the substrate and comprises at least a groove and a guide runner connected with the groove, and the solution is in the groove and part of the solution flows into the guide runner with the help of capillary phenomenon between the groove and the guide runner. The invention can discharge excessive solution outside the groove, reducing the probabilities of mixed flow, disturbing flow and end point defect and finally make a uniform film after the solution is completely dry.

Description

technical field [0001] The present invention relates to a micro-element and a manufacturing method thereof, in particular to a micro-element which utilizes channel design and capillary action to make the thickness of the fluid in it uniform. Background technique [0002] The inkjet method can be used to manufacture micro-components, such as color filters (ColorFilter), organic electroluminescent displays (organic electroluminescent display, OELD), micro-optical mirrors (Microlenses), and biomedical detection chips (Bio-Chip); In the general micro-component manufacturing process, a predetermined pattern is defined on a substrate, which is called a pixel, and is supplemented by a trench-like structural design, so that when the inkjet ink falls on the substrate, A uniform thin film can be produced. However, due to the physical behavior of the inkjet method, it is usually in an unstable state at the beginning of inkjet, which makes the produced defects more serious, and when th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/061G02F1/01
Inventor 郑兆凯宋兆峰李裕正胡纪平张惠珍杨进成
Owner IND TECH RES INST