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Photo resistance pumping spraying, reconnaissance circuit and its system

A technology for detecting circuits and circuits, which is applied to circuits, electrical components, and photo-plate-making process coating equipment, etc., and can solve the problem of destroying the spraying system 10 and wafers, etc.

Inactive Publication Date: 2008-06-11
MACRONIX INT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the transmission between the stepping motor 16-4 or the solenoid valve 16-6 and the printed circuit board 16-2 is only one-way
As a result, if the stepper motor 16-4 or the solenoid valve 16-6 fails, the spray controller 12 continues to operate, possibly resulting in damage to the spray system 10 and the wafers.

Method used

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  • Photo resistance pumping spraying, reconnaissance circuit and its system
  • Photo resistance pumping spraying, reconnaissance circuit and its system
  • Photo resistance pumping spraying, reconnaissance circuit and its system

Examples

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Embodiment Construction

[0032] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same figure numbers will be used in the icons to refer to the same or like parts.

[0033] figure 2 is a block diagram of a spraying system according to one embodiment of the present invention. refer to figure 2 , a spraying system 30 includes a spraying controller 32 , a pump controller 34 , a pump 36 and a detection circuit 38 electrically coupled to the spraying controller 32 and the pump 36 . The pump 36 includes a printed circuit board 36-2, a stepper motor 36-4 and a solenoid valve 36-6. The spray controller 32 controls the amount of photoresist or polyimide to be sprayed on a wafer (not shown). The pump controller 34 activates (activates) or deactivates (deactivates) the stepper motor 36 - 4 and the solenoid valve 36 - 6 through the printed circuit board 36 - 2 , and the pump controller 34 corresponds t...

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PUM

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Abstract

The present invention relates to a photoresist pump sprayed detection circuit. It includes a firest relay coupled with an electromagnetic valve for detecting operation state of said electromagnetic valve, a second relay which is coupled with said first relay, regulated and can be closed because said first relay is closed; a sensor for inspecting operation state of a component, a third relay which is coupled with sensor, in which said sensor is regulated and can be used for providing a signal to activate said third relay, and the second relay can be tripped because said third relay is closed, and a fourth relay which is coupled with first relay and second relay, in which when said first relay is tripped and said second relay is closed, said fourth relay is closed.

Description

technical field [0001] The present invention relates to an electronic circuit, in particular to a photoresist pump spray detection system for spraying a photomask material in a photolithography process. Background technique [0002] In the semiconductor industry, the fabrication of semiconductor components requires hundreds of process steps, including but not limited to diffusion, etching, thin film deposition, ion implantation, polishing, and photolithography. A photolithography process typically involves depositing or coating a layer of mask material, such as photoresist or polyimide, on a wafer. figure 1 A block diagram of an existing system for dispensing photoresist or polyurethane is shown. refer to figure 1 , a spraying system 10 includes a spraying controller 12, a pump controller 14 and a pump 16, the spraying controller 12 is provided to control the spraying of photoresist, the pump controller 14 is electrically coupled to the spraying controller 12, and it is pr...

Claims

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Application Information

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IPC IPC(8): G03F7/16B05C5/00B05C11/08H01L21/027H01L21/30
Inventor 王景辉陈宪忠彭宗翰
Owner MACRONIX INT CO LTD